MT95-DC
Miniature Linear stages

Linear Stage 95 x 95 x 40 mm, Travel up to 40 mm, Rep 1.5 µm, Load 6 kg, Speed 2 mm/s
MT95-DC

 

Compact positioner with internal motor

Thanks to its cross roller bearings, the MT95 miniature linear stage provides excellent straightness and flatness. The drive is redirected with a toothed belt transmission and could thus be completely accommodated in the axis.

  • Ideal for small installation spaces (95 x 95 x 40 mm)
  • Repeatability up to ± 1.5 µm
  • Easily stackable to compact multi-axis systems
Options:
  • Available with DC motor or stepper motor
  • 3-axis compact unit: MP95-3
  • Version for clean room and vacuum on request

Fields of application

Positioning in small spaces e.g. incubators, fiber positioning, camera and microscope positioners, aligners for vacuum chambers, setup of minimum space XYZ multi-axis systems, manipulator for industry and research, compact clean room positioning systems, wafer prober alignment

 

MT95   -40-DC-R 
Travel [mm] 40
Repeatability unidirectional [μm] ± 1.5 
Repeatability bidirectional [μm] ± 3.5 
Accuracy [μm] ± 4.8 
Flatness [μm] ± 2 
Straightness [μm] ± 1.4 
Positioning speed [mm/s] 1.1
Max. speed [mm/s] 2.2
Max. acceleration [m/s2] 0.02 
Max. load Fx [N] 30
Max. load Fy [N] 65
Max. load Fz [N] 65
Max. torque Mx [Nm] 3.2
Max. torque My [Nm] 1.3
Max. torque Mz [Nm] 1.1
Pitch [µrad] ± 65
Yaw [µrad] ± 40
Length [mm] 95
Width [mm] 95
Height [mm] 40
Weight [kg] 0.8
Screw type Ball Screw 1112.513/1.6.64.84 P5P
Screw lead 1
Bearing   Cross Roller Bearings
Motor   DC-Motor
Feedback   Motor-Encoder
Material   Anodized Aluminum
Optional features High-resolution measuring system, DC or Stepper Motor, combination to a XYZ-R system, custom adapter, bore grid, cable / plugs
Variants clean room  up to clean room class ISO 5 (higher on request)
Variants beam UV, DUV (EUV, X-ray, gamma on request)
Variants Magnetism on request
Variants vacuum  on request

 


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Are you looking for a technical solution for your application?

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Katja Weißbach
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Ronald Schulze
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T +49 351 88585-67
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Francisco Samuel
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