MT130-SM
Miniature Linear stages

Linear Stage 130 x 130 x 43 mm, Travel up to 80 mm, Rep 2.3 µm, Load 9 kg, Speed 40 mm/s

Compact linear stage with internal motor

The miniature linear stage provides excellent straightness and flatness thanks to roller bearings. The drive is completely housed in the highly compact positioning system.

Travels up to 80 mm in small installation spaces (130 x 130 x 43 mm)

Repeatability up to 2.3 µm

Easily stackable to compact multi-axis systems

Options:

Available with DC motor or stepper motor
3-axis compact unit: MP130-3
Combinable with DT130 rotary stage
Stainless steel option for increased rigidity
Version for clean room, vacuum and EUV

Fields of application

Positioning in small spaces e.g. camera, microscope (AFM, WLI), setup of minimum space XYZ multi-axis systems, manipulator for industry and research, compact clean room positioning systems, wafer inspection, wafer prober alignment

Specifications

Modell MT130		-50-SM	-80-SM
Travel	[mm]	50	80
Repeatability unidirectional	[µm]	± 2.3	± 2.3
Repeatability bidirectional	[µm]	± 4.3	± 4.3
Accuracy	[µm]	± 8.1	± 9.7
Flatness	[µm]	± 2.5	± 4
Straightness	[µm]	± 1.8	± 2.8
Positioning speed	[mm/s]	20	20
Max. speed	[mm/s]	40	40
Max. acceleration	[m/s²]	0.4	0.4
Max. load F_x	[N]	45	45
Max. load F_y	[N]	95	95
Max. load F_z	[N]	95	95
Max. torque M_x	[Nm]	4.6	4.6
Max. torque M_y	[Nm]	1.8	1.8
Max. torque M_z	[Nm]	1.6	1.6
Pitch	[µrad]	± 70	± 90
Yaw	[µrad]	± 40	± 55
Weight	[kg]	1.8	2.3
Length	[mm]	130	130
Width	[mm]	130	130
Height	[mm]	43	43
Motor		Stepper Motor	Stepper Motor
Feedback		Open Loop	Open Loop