MT130-SM
Miniature Linear stages
Linear Stage 130 x 130 x 43 mm, Travel up to 80 mm, Rep 2.3 µm, Load 9 kg, Speed 40 mm/s
Compact linear stage with internal motor
The miniature linear stage provides excellent straightness and flatness thanks to roller bearings. The drive is completely housed in the highly compact positioning system.
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Options:
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Fields of application
Positioning in small spaces e.g. camera, microscope (AFM, WLI), setup of minimum space XYZ multi-axis systems, manipulator for industry and research, compact clean room positioning systems, wafer inspection, wafer prober alignment
| Modell MT130 | -50-SM | -80-SM | |
| Travel | [mm] | 50 | 80 |
| Repeatability unidirectional | [µm] | ± 2.3 | ± 2.3 |
| Repeatability bidirectional | [µm] | ± 4.3 | ± 4.3 |
| Accuracy | [µm] | ± 8.1 | ± 9.7 |
| Flatness | [µm] | ± 2.5 | ± 4 |
| Straightness | [µm] | ± 1.8 | ± 2.8 |
| Positioning speed | [mm/s] | 20 | 20 |
| Max. speed | [mm/s] | 40 | 40 |
| Max. acceleration | [m/s2] | 0.4 | 0.4 |
| Max. load Fx | [N] | 45 | 45 |
| Max. load Fy | [N] | 95 | 95 |
| Max. load Fz | [N] | 95 | 95 |
| Max. torque Mx | [Nm] | 4.6 | 4.6 |
| Max. torque My | [Nm] | 1.8 | 1.8 |
| Max. torque Mz | [Nm] | 1.6 | 1.6 |
| Pitch | [µrad] | ± 70 | ± 90 |
| Yaw | [µrad] | ± 40 | ± 55 |
| Weight | [kg] | 1.8 | 2.3 |
| Length | [mm] | 130 | 130 |
| Width | [mm] | 130 | 130 |
| Height | [mm] | 43 | 43 |
| Motor | Stepper Motor | Stepper Motor | |
| Feedback | Open Loop | Open Loop |
FMC 220
Versatile combinable controller, ideal for laboratory applications, control of 1 - 128 axes simultaneously
PLC
We support integration of our systems into PLC architectures, e.g. Beckhoff
FMC 250/280
Multi-axis controller with increased current and voltage for point-to-point positioning.
ACS
We support integration of our systems into your ACS environment
Related Products
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