Miniature Linear stages

Some miniature linear stages can be combined to form compact multi-axis systems that are easily controlled by our FMC series motion controllers.

MT130-DC

Linear Stage 130 x 130 x 43 mm, Travel up to 80 mm, Rep 0.7 µm, Load 9 kg, Speed 60 mm/s

MT130-SM

Linear Stage 130 x 130 x 43 mm, Travel up to 80 mm, Rep 2.3 µm, Load 9 kg, Speed 40 mm/s

MT105-NM

Micro stage for demanding environments. Equipped with precision cross roller bearings and piezo…

MT105-PM

Micro stage with cross roller bearings and Piezo LEGS® motor for demanding environments.

MT95-DC

Linear Stage 95 x 95 x 40 mm, Travel up to 40 mm, Rep 1.5 µm, Load 6 kg, Speed 2 mm/s

MT95-SM

Linear Stage 95 x 95 x 40 mm, Travel up to 40 mm, Rep 2.1 µm, Load 6 kg, Speed 11 mm/s

MT63-DC

Micro stage for high precision applications. Driven by a DC Motor.

MT63-SM

Micro stage for high precision applications. Driven by a stepper motor.

MT53-PM

Micro stage with cross roller bearings and piezo motor for steps in nanometer range.

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Stages for cleanroom and vacuum applications

Even more stage for your clean room and vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar and clean room class ISO 6 - or even better - available. Click here for the overview of our vacuum and clean room stages!

Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:

Elger Matthes
Development, Consulting, Concepts, Innovation

T +49 (0) 351 88585-82

E-Mail

Francisco Samuel
Consulting &
Project Management

T +49 (0) 351 88585-85