PMT160-EDLM
Linear Stages

High precision linear stage (linear motor), travel 50 - 260 mm, rep ± 0.3 µm, load 1,4 kg, speed 375 mm/s
PMT160-EDLM

Precision measurement stage with high resolution

Because of its drive concept in combination with a high-resolution linear measuring system, the PMT160-EDLM provides increments in the submicro range together with high positioning speeds.

Compact and suitable for industrial applications

Thanks to its closed design with integrated cable routing, the PMT160-EDLM is the ideal precision measurement stage for industrial applications. In combination with a controller with error compensation, it achieves excellent accuracies.

Long lifetime despite continuous dynamic load

With its wear-free drive concept, the PMT160-EDLM guarantees an excellent lifetime even with high acceleration - for example, in laser technology or the semiconductor industry.

 

PMT160   -50-EDLM-L -100-EDLM-L -150-EDLM-L -200-EDLM-L -260-EDLM-L
Travel [mm] 50 100 150 200 260
Repeatability unidirectional [μm] ± 0.3 ± 0.3 ± 0.3 ± 0.3 ± 0.3
Repeatability bidirectional [μm] ± 0.4 ± 0.4 ± 0.4 ± 0.4 ± 0.4
Accuracy [μm] ± 0.9 ± 1.1 ± 1.3 ± 1.5 ± 1.7
Flatness [μm] ± 0.5 ± 1 ± 1.5 ± 2 ± 2.6
Straightness [μm] ± 0.4 ± 0.7 ± 1.1 ± 1.4 ± 1.9
Positioning speed [mm/s] 250 250 250 250 250
Max. speed [mm/s] 375 375 375 375 375
Max. acceleration [m/s2] 5 5 5 5 5
Max. load Fx [N] 14 14 14 14 14
Max. load Fy [N] 150 150 150 150 150
Max. load Fz [N] 150 150 150 150 150
Max. torque Mx [Nm] 8.6 8.6 8.6 8.6 8.6
Max. torque My [Nm] 8.8 8.8 8.8 8.8 8.8
Max. torque Mz [Nm] 8.2 8.2 8.2 8.2 8.2
Pitch [µrad] ± 20 ± 30 ± 35 ± 40 ± 50
Yaw [µrad] ± 11 ± 15 ± 18 ± 20 ± 25
Resolution [µm] 0.1 0.1 0.1 0.1 0.1
Weight [kg] 6.1 6.9 7.9 8.5 10.5
Length [mm] 275 315 385 460 585
Width [mm] 213 213 213 213 213
Height [mm] 40 40 40 40 40

Solutions with PMT160-EDLM

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1 KT230-EDLM - XY Stages

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1 KT500-EDLM - XY Stages

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Angepasstes System für Ihr Gesamtkonzept

Your customized system

Stages for cleanroom and vacuum applications

Even more stage for your clean room and vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar and clean room class ISO 6 - or even better - available. Click here for the overview of our vacuum and clean room stages!

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Elger Matthes
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