PLT165-DLM
Linear Stages
High performance stage (linear motor), travel 200 - 750 mm, rep ± 0.4 µm, load 6 kg, speed 1155 mm/s
Robust precision stage
The drive concept of this linear stage is based on a linear motor, thus allowing high acceleration and speed. This makes the linear stage ideal for horizontal applications where these characteristics are required.
Made for industrial applications
With a width of 165 mm, the PLT165 is the narrowest in its series. It is used as a single axis or as the top axis in multi-axis systems. The protect housing and metal strip cover design ensure protection against dust and particles in industrial environments.
Versatile fields of application
The PLT165 with dynamic linear motor is suitable for all areas of industry in which the precise adjustment of probes, sensors or optics is required - such as, for example, lacer machining, semiconductor technology or measurement egineering.
PLT165 | -200-DLM-L | -300-DLM-L | -400-DLM-L | -500-DLM-L | -750-DLM-L | |
Travel | [mm] | 200 | 300 | 400 | 500 | 750 |
Repeatability unidirectional | [μm] | ± 0.4 | ± 0.4 | ± 0.4 | ± 0.4 | ± 0.4 |
Repeatability bidirectional | [μm] | ± 0.5 | ± 0.5 | ± 0.5 | ± 0.5 | ± 0.5 |
Accuracy | [μm] | ± 1.5 | ± 1.8 | ± 2 | ± 2.2 | ± 2.8 |
Flatness | [μm] | ± 6 | ± 9 | ± 12 | ± 15 | ± 25 |
Straightness | [μm] | ± 3 | ± 4.5 | ± 6 | ± 7.5 | ± 11 |
Positioning speed | [mm/s] | 470 | 530 | 580 | 630 | 770 |
Max. speed | [mm/s] | 705 | 795 | 870 | 945 | 1155 |
Max. acceleration | [m/s2] | 9.5 | 11 | 12 | 13 | 15 |
Max. load Fx | [N] | 60 | 60 | 60 | 60 | 60 |
Max. load Fy | [N] | 520 | 520 | 520 | 520 | 520 |
Max. load Fz | [N] | 520 | 520 | 520 | 520 | 520 |
Max. torque Mx | [Nm] | 13 | 13 | 13 | 13 | 13 |
Max. torque My | [Nm] | 19 | 19 | 19 | 19 | 19 |
Max. torque Mz | [Nm] | 25 | 25 | 25 | 25 | 25 |
Pitch | [µrad] | ± 30 | ± 35 | ± 40 | ± 45 | ± 55 |
Yaw | [µrad] | ± 14 | ± 17 | ± 20 | ± 20 | ± 25 |
Resolution | [µm] | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 |
L1 | [mm] | 500 | 600 | 700 | 800 | 1050 |
Related Products
Designs for cleanroom, beam and vacuum
Almost all atmospheric standard systems are anodized with UHV lubrication for residual pressures up to 10E-6 mbar and min. cleanroom class ISO 6 - or even better - available.
Overwiew cleanroom & vacuum systems Contact technical consultants
Are you looking for a technical solution for your application?
Get your first 3D Design in a few days:
Elger Matthes
Development, Consulting, Concepts, Innovation
T +49 (0) 351 88585-82 |
Francisco Samuel
Consulting &
Project Management
T +49 (0) 351 88585-85 |
Ronald Schulze
Consulting, Project Management & Engineering
T +49 (0) 351 88585-67 |
Our references