LA250-DLM
Linear Axes

High load stage (linear motor), travel up to 2000 mm, rep ± 0.4 µm, load up to 25 kg, Speed up to 3090 mm/s
LA250-DLM

Linear axis on granite base for highest demands

This linear axis is designed to precisely positioning of very high loads with particularly long travels of 500 mm up to 2000 mm. The basis of this positioning system is a granite plate, which allows excellent resolution values to be achieved. The drive concept is based on a dynamic linear motor and a linear measuring system, whereby high speeds and accelerations are achieved with high precision and very good reproducibility.

  • Ideal for inspection systems and pick-and-place systems
  • High repeatability up to 0.4 µm
  • High dynamic at speeds up to 2060 mm/s
  • Very high load capacity up to 3100 N
  • Excellent flatness up to 1.5 µm
  • Long travels from 500 - 2000 mm

Fields of application

metrology, inspection systems, laser processing, tool measurement, parts measurement, surface inspection, assembly systems, testing systems, quality assurance, pick-and-place systems

 

LA250-DLM   -500-DLM-L -1000-DLM-L -1500-DLM-L -2000-DLM-L
Travel [mm] 500 1000 1500 2000
Repeatability unidirectional [μm] ± 0.4 ± 0.4 ± 0.4 ± 0.4
Repeatability bidirectional [μm] ± 0.5 ± 0.5 ± 0.5 ± 0.5
Accuracy [μm] ± 2.1 ± 3.3 ± 4.5 ± 5.6
Flatness [μm] ± 2.5 ± 5 ± 7.5 ± 10
Straightness [μm] ± 2.5 ± 5 ± 7.5 ± 10
Positioning speed [mm/s] 790 1210 1630 2060
Max. speed [mm/s] 1185 1815 2445 3090
Max. acceleration [mm/s2] 16 25 35 40
Max. load Fx [N] 250 250 250 250
Max. load Fy [N] 3100 3100 3100 3100
Max. load Fz [N] 3100 3100 3100 3100
Max. torque Mx [Nm] 110 110 110 110
Max. torque My [Nm] 150 150 150 150
Max. torque Mz [Nm] 150 150 150 150
Pitch [µrad] ± 20 ± 30 ± 40 ± 45
Yaw [µrad] ± 11 ± 16 ± 19 ± 20
Length [mm] 1030 1530 2030 2530
Width [mm] 250 250 250 250
Height [mm] 160 160 160 160
Weight [kg] ± 150 ± 150 ± 225 ± 300
Bearing   Profile Rail
Motor   Iron Core Dynamic Linear Motor
Feedback   Linear Scale
Measuring system resolutions    0.1 µm (optionally up to 0.001 µm)
Material   Anodized Aluminum, Granite
Optional features   Frame, custom adapter, bore grid, cable / plugs
Variants clean room  up to clean room class ISO 6 (higher on request)
Variants beam   UV (DUV, EUV, X-ray, gamma on request)
Variants magnetism magnetic
Variants vacuum    on request

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Angepasstes System für Ihr Gesamtkonzept

Your customized system

Designs for cleanroom, beam and vacuum

Almost all atmospheric standard systems are anodized with UHV lubrication for residual pressures up to 10E-6 mbar and min. cleanroom class ISO 6 - or even better - available.

Overwiew cleanroom & vacuum systems       Contact technical consultants

 

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