KT600-EDLM
XY Stages
High load XY stage (linear motor), travel 450 x 450 mm, rep ± 0.2 µm, load 30 kg, speed 500 mm/s
Precision giant with the highest repeatability
This large precision xy stage is designed for maximum repeatability. Accuracy can be achieved with compensation in a cost-saving manner, which is otherwise only reserved for air bearing systems.Polished cross roller guides are used for repeatability of straightness and flatness of + -0.15 µm. An ironless electrodynamic linear motor ensures high dynamics. The motors in X and Y, which are matched to the different moving masses, ensure homogeneous dynamic behavior. The stages behaves the same in both axes.
Fastest scanning applications with high acceleration
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Fields of application
Fast scanning applications and dynamic web <link en/competence-center-positioning-technology/glossary/detail/?tx_dpnglossary_glossarydetail%5Bcontroller%5D=Term&tx_dpnglossary_glossarydetail%5Baction%5D=show&tx_dpnglossary_glossarydetail%5Bterm%5D=2&tx_dpnglossary_glossarydetail%5BpageUid%5D=252&cHash=c4c316b26eb0b4cb44f61988b6615122 title="Path that the positioning system can travel between the end switches that have just reset.">travel e.g. semiconductor inspection, measuring systems, automatic optical inspection (AOI), measuring devices, differential measurement, replacement for <link en/competence-center-positioning-technology/glossary/detail/?tx_dpnglossary_glossarydetail%5Bcontroller%5D=Term&tx_dpnglossary_glossarydetail%5Baction%5D=show&tx_dpnglossary_glossarydetail%5Bterm%5D=24&tx_dpnglossary_glossarydetail%5BpageUid%5D=252&cHash=3a782fdd5c7438361ad171784d611232 title="Air bearings combine outstanding operating parameters in terms of flatness, waviness and straightness at the same time with high speeds and accelerations.">air bearing systems
Modell KT600 | -450-EDLM-L | |
Travel | [mm] | 450 |
Repeatability unidirectional | [μm] | ± 0.2 |
Repeatability bidirectional | [μm] | ± 0.3 |
Accuracy | [μm] | ± 4.8 |
Flatness | [μm] | ± 13 |
Straightness | [μm] | ± 2.5 |
Positioning speed | [mm/s] | 330 |
Max. speed | [mm/s] | 500 |
Max. acceleration | [m/s2] | 3 |
Max. load Fx | [N] | 25 |
Max. load Fy | [N] | 25 |
Max. load Fz | [N] | 300 |
Max. torque Mx | [Nm] | 32 |
Max. torque My | [Nm] | 32 |
Max. torque Mz | [Nm] | 30 |
Pitch | [µrad] | ± 110 |
Yaw | [µrad] | ± 110 |
Length | [mm] | 600 |
Width | [mm] | 600 |
Height | [mm] | 110 |
Motor | Dynamischer Linearmotor (eisenlos), Ironless Dynamic Linear Motor | |
Feedback | Linearmesssystem, Linear Scale |
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Even more stage for your clean room and vacuum applications?
Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar and clean room class ISO 6 - or even better - available. Click here for the overview of our vacuum and clean room stages!
Are you looking for a technical solution for your application?
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