KT500-EDLM
XY Stages
Performance XY stage (linear motor), travel 350 x 350 mm, rep ± 0.3 µm, load 10 kg, speed 300 mm/s
Flat, precise and fast
The KT500 not only impresses with its very flat and compact design. Thanks to 350 mm travel, even large substrates and parts can be scanned over the entire surface. It is designed in such a way that all process parameters can be exactly repeated and a comparable performance of air bearing systems is achieved. Thanks to a cable interface that can be disconnected via a plug connection, simple installation and maintenance-free operation up to 500,000 full strokes is possible.
Highly dynamic XY system with long lifetime
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Fields of application
Fast scanning applications and dynamic trajectory e.g. semiconductor inspection, metrology equipment, automatic optical inspection (AOI), measuring equipment, differential measurement, replacement for air bearing stages
KT500 | -350-EDLM-L | |
Travel | [mm] | 350 |
Repeatability unidirectional | [μm] | ± 0.3 |
Repeatability bidirectional | [μm] | ± 0.4 |
Accuracy | [μm] | ± 10 |
Flatness | [μm] | ± 10 |
Straightness | [μm] | ± 5 |
Positioning speed | [mm/s] | 200 |
Max. speed | [mm/s] | 300 |
Max. acceleration | [m/s2] | 1000 |
Max. load Fx | [N] | 25 |
Max. load Fy | [N] | 25 |
Max. load Fz | [N] | 100 |
Max. torque Mx | [Nm] | 11 |
Max. torque My | [Nm] | 11 |
Max. torque Mz | [Nm] | 11 |
Pitch | [µrad] | ± 190 |
Yaw | [µrad] | ± 95 |
Length | [mm] | 500 |
Width | [mm] | 500 |
Height | [mm] | 90 |
Motor | Dynamischer Linearmotor (eisenlos), Ironless Dynamic Linear Motor | |
Feedback | Linearmesssystem, Linear Scale |
FMC 300
Installation module for dynamic applications and high loads and voltage.
ACS
We support integration of our systems into your ACS environment
PLC
We support integration of our systems into PLC architectures, e.g. Beckhoff
FMC 250/280
Multi-axis controller with increased current and voltage for point-to-point positioning.
FMC400/450
Multi-axis controller fully ready for tracking, simple creation of own programs.
Related Products
Designs for cleanroom, beam and vacuum
Almost all atmospheric standard systems are anodized with UHV lubrication for residual pressures up to 10E-6 mbar and min. cleanroom class ISO 6 - or even better - available.
Overwiew cleanroom & vacuum systems Contact technical consultants
Are you looking for a technical solution for your application?
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Consulting, Project Management & Engineering
T +49 (0) 351 88585-67 |
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