KLT310-SM
XY Stages

High load XY stage (ball screw), travel 100 x 100 mm, rep ± 1.6 µm, load 28 kg, speed 20 mm/s
KLT310-SM

High precision XY stage with high load rating

The XY stage combines two highly precise axes achieving outstanding values in accuracy. Its robust structure and travel of 100 mm in the X and Y directions means the KLT310 also enables highaccuracy positioning of heavy loads.
The values of the KLT310 correspond with the special requirements that are of major importance, particularly in measurement engineering.

Ideal for demanding measurement applications

  • High-precision positioning of loads up to 280 N
  • Accuracy values up to 1.6 µm due to high-precision spindle axes
  • Optional with stepper motor, DC motor and in different
    measuring system resolutions
  • Vacuum version available

Fields of application

Metrology, test engineering, surface inspection, inspection systems, inspection of heavy parts, laser processing, micro laser processing, photonics, tool measurement, microscopy

 

KLT310   -100-SM
Travel [mm] 100
Repeatability unidirectional [μm] ± 1.6
Repeatability bidirectional [μm] ± 2.1
Accuracy [μm] ± 10
Flatness [μm] ± 4
Straightness [μm] ± 3
Positioning speed [mm/s] 10
Max. speed [mm/s] 20
Max. acceleration [m/s2] 0.2
Max. load Fx [N] 45
Max. load Fy [N] 45
Max. load Fz [N] 280
Max. torque Mx [Nm] 6.1
Max. torque My [Nm] 6.1
Max. torque Mz [Nm] 5.6
Pitch [µrad] ± 150
Yaw [µrad] ± 100
Motor   Stepper Motor
Feedback   Open Loop

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Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar and clean room class ISO 6 - or even better - available. Click here for the overview of our vacuum and clean room stages!


Are you looking for a technical solution for your application?

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Elger Matthes
Development, Consulting, Concepts, Innovation

T +49 (0) 351 88585-82
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Francisco Samuel
Consulting &
Project Management

T +49 (0) 351 88585-85
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Ronald Schulze
Consulting, Project Management & Engineering

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