KDT380-DC
XY Stages

XY stage (ball screw), travel 155 x 155 mm, aperture 170 mm, rep ± 0.5 µm, load 11 kg, speed 50 mm/s

Precision aperture stage for heavy loads

The KDT380 heavy-duty XY stage with aperture enables high-precision positioning of heavy loads up to 20 kg. The use of a free ball screw drive enables maximum precision as well as excellent running behavior, while at the same time providing very high rigidity and a long life time.

Highly compact for a wide range of inspection tasks

Ideal for high-precision inspection, microscopy or scanning applications

Large Aperture of 170 x 170 mm

Very rigid positioning of high loads up to 20 kg

Options:

Available with DC motor or stepper motor
Different high resolution measuring systems
Version for clean room and vacuum on request

Fields of application

metrology, high resolution microscopy, 3D inspection, inspection systems, inspection technology, automatic optical inspection (AOI), inline inspection, surface inspection, coating thickness measurement

Specifications

Modell KDT380		-155-DC-R	-155-DC-L	-155-SM
Travel	[mm]	155	155	155
Repeatability unidirectional	[µm]	± 2	± 0.5	± 1.6
Repeatability bidirectional	[µm]	± 2.5	± 0.7	± 2.1
Accuracy	[µm]	± 13.5	± 3.5	± 13.2
Flatness	[µm]	± 11	± 11	± 11
Straightness	[µm]	± 3.9	± 3.9	± 3.9
Positioning speed	[mm/s]	35	35	13
Max. speed	[mm/s]	50	50	20
Max. acceleration	[m/s²]	0.5	0.5	0.2
Max. load Fx	[N]	45	45	45
Max. load Fy	[N]	45	45	45
Max. load Fz	[N]	110	110	110
Max. torque Mx	[Nm]	5.3	5.3	5.3
Max. torque My	[Nm]	5.3	5.3	5.3
Max. torque Mz	[Nm]	5.1	5.1	5.1
Pitch	[µrad]	± 190	± 190	± 190
Yaw	[µrad]	± 120	± 120	± 120
Wight	[kg]	30	30	30
Length	[mm]	380	380	380
Width	[mm]	380	380	380
Heigt	[mm]	100	100	100
Aperture	[mm]	170 x 170	170 x 170	170 x 170
Motor		DC-Motor	DC-Motor	Stepper Motor
Feedback		Motor-Encoder	Linear Scale	Open Loop