KDT310-SM
XY Stages

XY stage (ball screw), travel 100 x 100 mm, aperture 150 mm, rep ± 1.6 µm, load 7 kg, speed 20 mm/s

Scanning stage with large aperture

The space-saving design and large aperture characterize these robust XY stage. High precision ball screws and adjustable othogonality ensure highly precise positioning and running accuracies. At the same time, it impresses with ist good value for money and long lifetime.

Designed for microscopy tasks

Ideal for microscopy, optical inspection systems and laser processing
High-precision repeatability up to 1.6 µm
Good price-performance ratio and very long life cycle
Optional as DC-Motor version or with 50 mm travel (KDT235) available

Fields of application

High-resolution applications in microscopy, optical inspection systems, 3-D imaging, screening, interferometry, metrology, autofocus systems, biotechnology, semiconductor testing

Specifications

Modell KDT310		-100-SM
Travel	[mm]	100
Repeatability unidirectional	[μm]	± 1.6
Repeatability bidirectional	[μm]	± 2.1
Accuracy	[μm]	± 18.1
Flatness	[μm]	± 7
Straightness	[μm]	± 5
Positioning speed	[mm/s]	10
Max. speed	[mm/s]	20
Max. acceleration	[m/s²]	0.2
Max. load Fx	[N]	45
Max. load Fy	[N]	45
Max. load Fz	[N]	70
Max. torque Mx	[Nm]	6.1
Max. torque My	[Nm]	6.1
Max. torque Mz	[Nm]	5.6
Pitch	[µrad]	± 150
Yaw	[µrad]	± 100
Weight	[kg]	13
Length	[mm]	310
Width	[mm]	310
Height	[mm]	80
Aperture	[mm]	150
Motor		Schrittmotor, Stepper Motor
Feedback		Open Loop