KDT235-SM
XY Stages
XY microscopy stage (ball screw), travel 50 x 50 mm, aperture 100, rep ± 1.6 µm, load 8 kg, speed 20 mm/s
Scanning stage with large aperture
The space-saving design and large aperture characterize these robust XY stage. High precision ball screws and adjustable othogonality ensure highly precise positioning and running accuracies.
Designed for microscopy tasks
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Options:
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Fields of application
High resolution applications in microscopy, optical inspection systems, 3D imaging, screening, incident light measurements, transmitted light measurements, interferometry, metrology, autofocus systems, biotechnology, semiconductor testing
Modell KDT235 | -50-SM | |
Travel | [mm] | 50 |
Repeatability unidirectional | [μm] | ± 1.6 |
Repeatability bidirectional | [μm] | ± 2.1 |
Accuracy | [μm] | ± 7.1 |
Flatness | [μm] | ± 3.5 |
Straightness | [μm] | ± 2.5 |
Positioning speed | [mm/s] | 10 |
Max. speed | [mm/s] | 20 |
Max. acceleration | [m/s2] | 0.2 |
Max. load Fx | [N] | 45 |
Max. load Fy | [N] | 45 |
Max. load Fz | [N] | 85 |
Max. torque Mx | [Nm] | 5.2 |
Max. torque My | [Nm] | 5.2 |
Max. torque Mz | [Nm] | 7.2 |
Pitch | [µrad] | ± 110 |
Yaw | [µrad] | ± 70 |
Weight | [kg] | 10 |
Length | [mm] | 235 |
Width | [mm] | 235 |
Height | [mm] | 80 |
Aperture | [mm] | 100 |
Motor | Schrittmotor, Stepper Motor | |
Feedback | Open Loop |
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Designs for cleanroom, beam and vacuum
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