KDT235-SM
XY Stages

XY microscopy stage (ball screw), travel 50 x 50 mm, aperture 100, rep ± 1.6 µm, load 8 kg, speed 20 mm/s
KDT235-SM

 

Scanning stage with large aperture

The space-saving design and large aperture characterize these robust XY stage. High precision ball screws and adjustable othogonality ensure highly precise positioning and running accuracies.

Designed for microscopy tasks

  • Ideal for microscopy, optical inspection systems and laser processing
  • High-precision repeatability up to 1.6 µm
  • Good price-performance ratio and very long life cycle

Options:

  • Available with DC motor or stepper motor
  • Travel range up to 100 mm (KDT310)
  • Different high resolution measuring systems
  • Version for clean room and vacuum on request

Fields of application

High resolution applications in microscopy, optical inspection systems, 3D imaging, screening, incident light measurements, transmitted light measurements, interferometry, metrology, autofocus systems, biotechnology, semiconductor testing

 

Modell KDT235   -50-SM
Travel [mm] 50
Repeatability unidirectional [μm] ± 1.6
Repeatability bidirectional [μm] ± 2.1
Accuracy [μm] ± 7.1
Flatness [μm] ± 3.5
Straightness [μm] ± 2.5
Positioning speed [mm/s] 10
Max. speed [mm/s] 20
Max. acceleration [m/s2] 0.2
Max. load Fx [N] 45
Max. load Fy [N] 45
Max. load Fz [N] 85
Max. torque Mx [Nm] 5.2
Max. torque My [Nm] 5.2
Max. torque Mz [Nm] 7.2
Pitch [µrad] ± 110
Yaw [µrad] ± 70
Weight [kg] 10
Length [mm] 235
Width [mm] 235
Height [mm] 80
Aperture [mm] 100
Motor   Schrittmotor, Stepper Motor
Feedback   Open Loop

 

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