KDT235-DC
XY Stages

XY microscopy stage (ball screw), travel 50 x 50 mm, aperture 100 mm, rep ± 0.5 µm, load 8 kg, speed 60 mm/s
KDT235-DC

Scanning stage with large aperture

The space-saving design and large aperture characterize these robust XY stage. High precision ball screws and adjustable othogonality ensure highly precise positioning and running accuracies.

Designed for microscopy tasks

  • Ideal for microscopy, optical inspection systems and laser processing
  • High-precision repeatability up to 0.5 µm
  • Good price-performance ratio and very long life cycle

Options:

  • Available with DC motor or stepper motor
  • Travel range up to 100 mm (KDT310)
  • Different high resolution measuring systems
  • Version for clean room and vacuum on request

Fields of application

High-<link en/competence-center-positioning-technology/glossary/detail/?tx_dpnglossary_glossarydetail%5Bcontroller%5D=Term&tx_dpnglossary_glossarydetail%5Baction%5D=show&tx_dpnglossary_glossarydetail%5Bterm%5D=118&tx_dpnglossary_glossarydetail%5BpageUid%5D=252&cHash=63e7db6214b28acbc8b38f32b43ce162 title="smallest change in distance that a system can distinguish">resolution applications in microscopy, optical inspection systems, 3D imaging, screening, incident light measurements, transmitted light measurements, interferometry, metrology, autofocus systems, biotechnology, semiconductor testing

 


         
Modell KDT235-50-DC-R-50-DC-L
Travel [mm] 5050
Repeatability unidirectional [μm]± 2± 0.5
Repeatability bidirectional [μm]± 2.5± 0.7
Accuracy [μm]± 7.4± 2.3
Flatness [μm]± 3.5± 3.5
Straightness [μm]± 2.5± 2.5
Positioning speed [mm/s]3030
Max. speed[mm/s]6060
Max. acceleration [m/s2]0.50.5
Max. load Fx [N]4545
Max. load Fy [N]4545
Max. load Fz [N]8585
Max. torque Mx [Nm]5.25.2
Max. torque My [Nm]5.25.2
Max. torque Mz [Nm]7.27.2
Pitch [µrad]± 110± 110
Yaw [µrad]± 70± 70
Weight [kg]1010
Length [mm]235235
Width [mm]235235
Height [mm]8080
Aperture [mm]100100
MotorDC-MotorDC-Motor
FeedbackMotor-EncoderLinear Scale

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Designs for cleanroom, beam and vacuum

Almost all atmospheric standard systems are anodized with UHV lubrication for residual pressures up to 10E-6 mbar and min. cleanroom class ISO 6 - or even better - available.

Overwiew cleanroom & vacuum systems       Contact technical consultants

 


Are you looking for a technical solution for your application?

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Elger Matthes
Development, Consulting, Concepts, Innovation

T +49 (0) 351 88585-82
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Francisco Samuel
Consulting &
Project Management

T +49 (0) 351 88585-85
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