KDT180-DC
XY Stages
XY Scanning stage (ball screw), travel 50 x 50 mm, aperture 90 mm, rep ± 2.3 µm, load 5 kg, speed 3 mm/s
Symmetrical XY stage in plate architecture with aperture
The KDT180 is a universally applicable stage, which convinces with its extremely flat design and the large aperture of 90 x 90 mm. The aperture enables differential measurements excluding residual errors of the stage or transmitted light measurements. This stage is therefore particularly suitable for metrology and optical applications.
Compact and flat with large aperture
|
|
|
Fields of application
Applications in microscopy, metrology, optics, 3D imaging, autofocus systems, electronics assembly, optics positioning, sample positioning, semiconductor inspection, measurement systems, measuring equipment
Modell KDT180 | -50-DC-R | |
Travel | [mm] | 50 |
Repeatability unidirectional | [μm] | ± 1.1 |
Repeatability bidirectional | [μm] | ± 2.1 |
Accuracy | [μm] | ± 13.1 |
Flatness | [μm] | ± 4.8 |
Straightness | [μm] | ± 3.6 |
Positioning speed | [mm/s] | 2.5 |
Max. speed | [mm/s] | 5 |
Max. acceleration | [m/s2] | 0.05 |
Max. load Fx | [N] | 45 |
Max. load Fy | [N] | 45 |
Max. load Fz | [N] | 55 |
Max. torque Mx | [Nm] | 0.9 |
Max. torque My | [Nm] | 0.9 |
Max. torque Mz | [Nm] | 0.7 |
Pitch | [µrad] | ± 120 |
Yaw | [µrad] | ± 75 |
Weight | [kg] | 2.5 |
Length | [mm] | 180 |
Width | [mm] | 180 |
Height | [mm] | 38 |
Aperture | [mm] | 90 x 90 |
Motor | DC-Motor | |
Feedback | Motor-Encoder |
Related Products
Designs for cleanroom, beam and vacuum
Almost all atmospheric standard systems are anodized with UHV lubrication for residual pressures up to 10E-6 mbar and min. cleanroom class ISO 6 - or even better - available.
Overwiew cleanroom & vacuum systems Contact technical consultants
Are you looking for a technical solution for your application?
Get your first 3D Design in a few days:
Elger Matthes
Development, Consulting, Concepts, Innovation
T +49 (0) 351 88585-82 |
Francisco Samuel
Consulting &
Project Management
T +49 (0) 351 88585-85 |
Ronald Schulze
Consulting, Project Management & Engineering
T +49 (0) 351 88585-67 |
Our references