2PLT165-DLM
XY Stages

High performance XY stage (linear motor), travel 500 x 400 mm, rep ± 0.4 µm, load 52 kg, speed 870 mm/s

High Performance XY Stage

The drive concept of this linear stage combination from the PLT165 series is based on a linear motor and enables high accelerations and speeds. The precision XY Stage is ideal for highly dynamic applications with high loads.

Made for industrial applications

The PLT160 series axes can be combined flexibly with travel ranges from 200 - 750 mm with different motor variants for light up to heavy-duty applications. The protected housing and metal strip cover ensure dust and particle protection in industrial environments.

Various fields of application

Reliable 24/7 positioning under constant parameters, precise feeding of samples, sensors or optics, laser processing, semiconductor technology or metrology

Specifications

2PLT165		-500-DLM-L-400-DLM-L
Art. No.		782300:152.26
Travel	[mm]	500 x 400
Repeatability unidirectional	[μm]	± 0.4
Repeatability bidirectional	[μm]	± 0.5
Positioning speed	[mm/s]	580
Max. speed	[mm/s]	870
Max. acceleration	[m/s2]	12
Max. load Fx	[N]	60
Max. load Fy	[N]	60
Max. load Fz	[N]	520
Length	[mm]	800
Width	[mm]	700
Height	[mm]	145
Weight	[kg]	45
Bearing		Profile Rail
Motor		Iron Core Dynamic Linear Motor
Feedback		Linear Scale
Resolution Measuring system		0.1 µm standard, optionally up to 0.001 µm
Material		Anodized Aluminum
Optional features		base plate (granite / aluminum), housing, break, prepared for sealing air, custom adapter, bore grid, cable / plugs
Variants clean room		up to clean room class ISO 6 (higher on request)
Variants beam		UV (DUV, EUV, X-ray, gamma on request)
Variants Magnetism		magnetic
Variants vacuum		on request

Controllers

PLC

We support integration of our systems into PLC architectures, e.g. Beckhoff

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Designs for cleanroom, beam and vacuum

Almost all atmospheric standard systems are anodized with UHV lubrication for residual pressures up to 10E-6 mbar and min. cleanroom class ISO 6 - or even better - available.

Overwiew cleanroom & vacuum systems Contact technical consultants