2PLT165-DLM
XY Stages
High performance XY stage (linear motor), travel 500 x 400 mm, rep ± 0.4 µm, load 52 kg, speed 870 mm/s

High Performance XY Stage
The drive concept of this linear stage combination from the PLT165 series is based on a linear motor and enables high accelerations and speeds. The precision XY Stage is ideal for highly dynamic applications with high loads.
Made for industrial applications
The PLT160 series axes can be combined flexibly with travel ranges from 200 - 750 mm with different motor variants for light up to heavy-duty applications. The protected housing and metal strip cover ensure dust and particle protection in industrial environments.
Various fields of application
Reliable 24/7 positioning under constant parameters, precise feeding of samples, sensors or optics, laser processing, semiconductor technology or metrology
2PLT165 | -500-DLM-L-400-DLM-L | |
Art. No. | 782300:152.26 | |
Travel | [mm] | 500 x 400 |
Repeatability unidirectional | [μm] | ± 0.4 |
Repeatability bidirectional | [μm] | ± 0.5 |
Positioning speed | [mm/s] | 580 |
Max. speed | [mm/s] | 870 |
Max. acceleration | [m/s2] | 12 |
Max. load Fx | [N] | 60 |
Max. load Fy | [N] | 60 |
Max. load Fz | [N] | 520 |
Length | [mm] | 800 |
Width | [mm] | 700 |
Height | [mm] | 145 |
Weight | [kg] | 45 |
Bearing | Profile Rail | |
Motor | Iron Core Dynamic Linear Motor | |
Feedback | Linear Scale | |
Resolution Measuring system | 0.1 µm standard, optionally up to 0.001 µm | |
Material | Anodized Aluminum | |
Optional features | base plate (granite / aluminum), housing, break, prepared for sealing air, custom adapter, bore grid, cable / plugs | |
Variants clean room | up to clean room class ISO 6 (higher on request) | |
Variants beam | UV (DUV, EUV, X-ray, gamma on request) | |
Variants Magnetism | magnetic | |
Variants vacuum | on request |
Related Products
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