MT105-PM
Miniature Linear stages

Linear Stage 152 x 105 x 25 mm, Travel 30 - 100 mm, Rep ± 0.2 µm, Load 1 kg, Speed 7.5 mm/s

Micro stage with high dynamics and speed

The MT105 is a micro stage for universal use characterized by its high dynamics and speed. Compared to its size, it has a large travel and very small step sizes thanks to the piezo motor.

Flexible and universal

The MT105 is equipped with precision cross roller bearings. It is possible to equip this micro stage with two motors for positioning higher loads, as an option. And the stage can be effortlessly com bined into an XYZ system.

Optimum for demanding environments

Challenging environments in research and development often require optional special solutions. The MT105 micro stage is designed to achieve outstanding processing and positioning accuracy under extreme conditions such as in high vacuum, ultra-high vacuum and even for non-magnetic applications.

Specifications

Modell MT105		-30-2PM-L	-50-PM-L
Travel	[mm]	30	50
Repeatability unidirectional	[μm]	± 0.2	± 0.2
Repeatability bidirectional	[μm]	± 0.3	± 0.3
Accuracy	[μm]	± 1.2	± 1.4
Flatness	[μm]	± 1.5	± 2.5
Straightness	[μm]	± 1.1	± 1.8
Positioning speed	[mm/s]	5	5
Max. speed	[mm/s]	7.5	7.5
Max. acceleration	[m/s²]	0.1	0.1
Max. load F_x	[N]	20	10
Max. load F_y	[N]	55	55
Max. load F_z	[N]	55	55
Max. torque M_x	[Nm]	2	2
Max. torque M_y	[Nm]	0.9	0.9
Max. torque M_z	[Nm]	0.7	0.7
Pitch	[µrad]	± 55	± 70
Yaw	[µrad]	± 35	± 40
Length	[mm]	152
Width	[mm]	105
Height	[mm]	25
Lubrication liquid	[mbar]	up to 10^-8
Lubrication dry	[mbar]	up to 10^-11
Max. Bakeout temperature	[deg]	120
Motor		Piezo Motor	Piezo Motor
Bearing		cross roller bearings
Feedback		Linear Scale
Resolution Measuring system		0.1 µm, optional 0.005 µm
Optional features		With up to 2 different motors for the motion of high loads, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants clean room		up to clean room class ISO 4 (higher on request)
Variants beam		UV, DUV, EUV (X-ray, gamma on request)
Variants Magnetism		magnetic, low-magnetic, magnet-free
Variants vacuum		all ranges up to 10E-11 mbar HV / UHV