LA340-EDLM
Linear Axes

High performance stage (air bearing), travel 500 - 2000 mm, rep ± 0.3 µm, load 10 kg, speed 3090 mm/s
LA340-EDLM

Highly dynamic linear stage with air bearing

The drive concept of this linear axis is based on a dynamic linear motor and a linear measuring system, whereby it provides excellent flatness and straightness for highly dynamic applications. The granite structure with air bearings provides particle-free operation and a particularly long lifetime.

  • Ideal for particle-free, highly dynamic applications with high precision
  • Perfect flatness and high repeatibility up to ± 0.3 µm
  • Highly dynamic at speeds of up to 2060 mm/s
  • High load up to 50 kg
  • Suitable for maintenance-free 3-shift operation in clean room

Options:

  • Travels from 500 - 2000 mm
  • Versions for clean room, laboratory or production
  • Optionally with base plate and frame
  • Different measuring system resolutions up to 0.001 µm
  • Customized development with 3D design, prototypes, large series production

Fields of application

linear stage for precision scanning, setup of dynamic and highly precise multi-axis systems for cleanroom applications, semiconductor technology: wafer inspection, measurement of large substrates, TFT / OLED inspection, semiconductor printers for applying coating components, biotechnology: laboratory diagnostics, image-based inline monitoring, high-speed microscopy, laboratory automation

 

LA340-EDLM   -500-EDLM-L -1000-EDLM-L -1500-EDLM-L -2000-EDLM-L
Travel [mm] 500 1000 1500 2000
Repeatability unidirectional [μm] ± 0.3 ± 0.3 ± 0.3 ± 0.3
Repeatability bidirectional [μm] ± 0.4 ± 0.4 ± 0.4 ± 0.4
Accuracy [μm] ± 1.9 ± 3 ± 4.1 ± 5.2
Flatness [μm] ± 0.8 ± 1.5 ± 2.3 ± 3
Straightness [μm] ± 0.8 ± 1.5 ± 2.3 ± 3
Positioning speed [mm/s] 790 1210 1630 2060
Max. speed [mm/s] 1185 1815 2445 3090
Max. acceleration [m/s2] 16 25 35 40
Max. load Fx [N] 100 100 100 100
Max. load Fy [N] 500 500 500 500
Max. load Fz [N] 500 500 500 500
Max. torque Mx [Nm] 30 30 30 30
Max. torque My [Nm] 50 50 50 50
Max. torque Mz [Nm] 30 30 30 30
Pitch [µrad] ± 11 ± 16 ± 19 ± 20
Yaw [µrad] ± 11 ± 16 ± 19 ± 20
Length [mm] 1060 1560 2060 2560
Width [mm] 379 379 379 379
Height [mm] 310 310 310 310
Weight [kg] 370
Weight with frame [kg] 640
Bearing   Air Bearing
Type of drive system Linear Motor
Motor   Ironless Dynamic Linear Motor
Feedback   Linear Scale
Measuring system resolutions    0.05 µm (optionally up to 0.001 µm)
Material   Anodized Aluminum, Granite
Optional features   Frame
Variants cleanroom  up to clean room class ISO 6 (higher on request)
Variants beam   UV (DUV, EUV, X-ray, gamma on request)
Variants magnetism on request
Variants vacuum    on request

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Angepasstes System für Ihr Gesamtkonzept

Your customized system

Designs for cleanroom, beam and vacuum

Almost all atmospheric standard systems are anodized with UHV lubrication for residual pressures up to 10E-6 mbar and min. cleanroom class ISO 6 - or even better - available.

Overwiew cleanroom & vacuum systems       Contact technical consultants

 

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Consulting &
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