KT600-EDLM
XY Stages

High load XY stage (linear motor), travel 450 x 450 mm, rep ± 0.2 µm, load 30 kg, speed 500 mm/s

Precision giant with the highest repeatability

This large precision xy stage is designed for maximum repeatability. Accuracy can be achieved with compensation in a cost-saving manner, which is otherwise only reserved for air bearing systems.Polished cross roller guides are used for repeatability of straightness and flatness of + -0.15 µm. An ironless electrodynamic linear motor ensures high dynamics. The motors in X and Y, which are matched to the different moving masses, ensure homogeneous dynamic behavior. The stages behaves the same in both axes.

Fastest scanning applications with high acceleration

Ideal for scanning applications or high-precision positioning
Extremely fast scan results by a positioning speed of 330 mm/s
Scan high loads with an extreme resolution of 0.05 µm
Cost-optimized to achieve the comparable performance of air bearing systems
Maintenance-free operation up to 500,000 full strokes, afterwards only a simple relubrication is necessary
Life expectancy up to two million full strokes
integrated cable management, plug-in terminal

Fields of application

Fast scanning applications and dynamic web <link en/competence-center-positioning-technology/glossary/detail/?tx_dpnglossary_glossarydetail%5Bcontroller%5D=Term&tx_dpnglossary_glossarydetail%5Baction%5D=show&tx_dpnglossary_glossarydetail%5Bterm%5D=2&tx_dpnglossary_glossarydetail%5BpageUid%5D=252&cHash=c4c316b26eb0b4cb44f61988b6615122 title="Path that the positioning system can travel between the end switches that have just reset.">travel e.g. semiconductor inspection, measuring systems, automatic optical inspection (AOI), measuring devices, differential measurement, replacement for <link en/competence-center-positioning-technology/glossary/detail/?tx_dpnglossary_glossarydetail%5Bcontroller%5D=Term&tx_dpnglossary_glossarydetail%5Baction%5D=show&tx_dpnglossary_glossarydetail%5Bterm%5D=24&tx_dpnglossary_glossarydetail%5BpageUid%5D=252&cHash=3a782fdd5c7438361ad171784d611232 title="Air bearings combine outstanding operating parameters in terms of flatness, waviness and straightness at the same time with high speeds and accelerations.">air bearing systems

Specifications

Modell KT600		-450-EDLM-L
Travel	[mm]	450
Repeatability unidirectional	[μm]	± 0.2
Repeatability bidirectional	[μm]	± 0.3
Accuracy	[μm]	± 4.8
Flatness	[μm]	± 13
Straightness	[μm]	± 2.5
Positioning speed	[mm/s]	330
Max. speed	[mm/s]	500
Max. acceleration	[m/s²]	3
Max. load Fx	[N]	25
Max. load Fy	[N]	25
Max. load Fz	[N]	300
Max. torque Mx	[Nm]	32
Max. torque My	[Nm]	32
Max. torque Mz	[Nm]	30
Pitch	[µrad]	± 110
Yaw	[µrad]	± 110
Length	[mm]	600
Width	[mm]	600
Height	[mm]	110
Motor		Dynamischer Linearmotor (eisenlos), Ironless Dynamic Linear Motor
Feedback		Linearmesssystem, Linear Scale

Controllers

FMC 300

Installation module for dynamic applications and high loads and voltage.

FMC400/450

Multi-axis controller fully ready for tracking, simple creation of own programs.

PLC

We support integration of our systems into PLC architectures, e.g. Beckhoff

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Designs for cleanroom, beam and vacuum

Almost all atmospheric standard systems are anodized with UHV lubrication for residual pressures up to 10E-6 mbar and min. cleanroom class ISO 6 - or even better - available.

Overwiew cleanroom & vacuum systems Contact technical consultants