KT600-EDLM
XY Stages

High load XY stage (linear motor), travel 450 x 450 mm, rep ± 0.2 µm, load 30 kg, speed 500 mm/s
KT600-EDLM

 

Precision giant with the highest repeatability

This large precision xy stage is designed for maximum repeatability. Accuracy can be achieved with compensation in a cost-saving manner, which is otherwise only reserved for air bearing systems.Polished cross roller guides are used for repeatability of straightness and flatness of + -0.15 µm. An ironless electrodynamic linear motor ensures high dynamics. The motors in X and Y, which are matched to the different moving masses, ensure homogeneous dynamic behavior. The stages behaves the same in both axes.

Fastest scanning applications with high acceleration

  • Ideal for scanning applications or high-precision positioning
  • Extremely fast scan results by a positioning speed of 330 mm/s
  • Scan high loads with an extreme resolution of 0.05 µm
  • Cost-optimized to achieve the comparable performance of air bearing systems
  • Maintenance-free operation up to 500,000 full strokes, afterwards only a simple relubrication is necessary
 
  • Life expectancy up to two million full strokes
 
  • integrated cable management, plug-in terminal

Fields of application

Fast scanning applications and dynamic web <link en/competence-center-positioning-technology/glossary/detail/?tx_dpnglossary_glossarydetail%5Bcontroller%5D=Term&tx_dpnglossary_glossarydetail%5Baction%5D=show&tx_dpnglossary_glossarydetail%5Bterm%5D=2&tx_dpnglossary_glossarydetail%5BpageUid%5D=252&cHash=c4c316b26eb0b4cb44f61988b6615122 title="Path that the positioning system can travel between the end switches that have just reset.">travel e.g. semiconductor inspection, measuring systems, automatic optical inspection (AOI), measuring devices, differential measurement, replacement for <link en/competence-center-positioning-technology/glossary/detail/?tx_dpnglossary_glossarydetail%5Bcontroller%5D=Term&tx_dpnglossary_glossarydetail%5Baction%5D=show&tx_dpnglossary_glossarydetail%5Bterm%5D=24&tx_dpnglossary_glossarydetail%5BpageUid%5D=252&cHash=3a782fdd5c7438361ad171784d611232 title="Air bearings combine outstanding operating parameters in terms of flatness, waviness and straightness at the same time with high speeds and accelerations.">air bearing systems

 

 

Modell KT600-450-EDLM-L
Travel [mm] 450
Repeatability unidirectional [μm]± 0.2
Repeatability bidirectional [μm]± 0.3
Accuracy [μm]± 4.8
Flatness [μm]± 13
Straightness [μm]± 2.5
Positioning speed [mm/s]330
Max. speed [mm/s]500
Max. acceleration [m/s2]3
Max. load Fx [N]25
Max. load Fy [N]25
Max. load Fz [N]300
Max. torque Mx [Nm]32
Max. torque My [Nm]32
Max. torque Mz [Nm]30
Pitch [µrad]± 110
Yaw [µrad]± 110
Length [mm]600
Width [mm]600
Height [mm]110
MotorDynamischer Linearmotor (eisenlos), Ironless Dynamic Linear Motor
FeedbackLinearmesssystem, Linear Scale

 

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