KT500-EDLM
XY Stages

Performance XY stage (linear motor), travel 350 x 350 mm, rep ± 0.3 µm, load 10 kg, speed 300 mm/s

Flat, precise and fast

The KT500 not only impresses with its very flat and compact design. Thanks to 350 mm travel, even large substrates and parts can be scanned over the entire surface. It is designed in such a way that all process parameters can be exactly repeated and a comparable performance of air bearing systems is achieved. Thanks to a cable interface that can be disconnected via a plug connection, simple installation and maintenance-free operation up to 500,000 full strokes is possible.

Highly dynamic XY system with long lifetime

High-precision repeatability up to 0.3 µm

Time savings in start-stop operation by top speeds of up to 400 mm/s and an acceleration of 1G

Maintenance-free operation up to 500,000 full strokes, afterwards only a simple relubrication is necessary

Life expectancy up to two million full strokes

Available with up to two electrodynamic linear motors per direction: 2+2 motors for particularly fast scan results, 2+1 motors for equal dynamics

Fields of application

Fast scanning applications and dynamic trajectory e.g. semiconductor inspection, metrology equipment, automatic optical inspection (AOI), measuring equipment, differential measurement, replacement for air bearing stages

Specifications

KT500		-350-EDLM-L
Travel	[mm]	350
Repeatability unidirectional	[μm]	± 0.3
Repeatability bidirectional	[μm]	± 0.4
Accuracy	[μm]	± 10
Flatness	[μm]	± 10
Straightness	[μm]	± 5
Positioning speed	[mm/s]	200
Max. speed	[mm/s]	300
Max. acceleration	[m/s²]	1000
Max. load Fx	[N]	25
Max. load Fy	[N]	25
Max. load Fz	[N]	100
Max. torque Mx	[Nm]	11
Max. torque My	[Nm]	11
Max. torque Mz	[Nm]	11
Pitch	[µrad]	± 190
Yaw	[µrad]	± 95
Length	[mm]	500
Width	[mm]	500
Height	[mm]	90
Motor		Dynamischer Linearmotor (eisenlos), Ironless Dynamic Linear Motor
Feedback		Linearmesssystem, Linear Scale