KT180-DC
XY Stages

XY microscopy stage (ball screw), travel 50 x 50 mm, rep ± 0.5 µm, load 6 kg, speed 5 mm/s

Ultra flat XY stage

The KT180 is a universally usable XY stage that is characterized by extremely flat design. Because of the corss roller bearings used, it achieves outstanding operational parameters which are critical for applications in measurement engineering. The XY stage design forms the basis of the internal motors concept.

Specially for measuring applications

Ideal for inspection systems, microscopy and measuring systems

High-precision repeatability up to 0.5 µm

Optional with DC motor or stepper motor

Fields of application

Applications in microscopy, metrology, inspection systems, optics, 3D imaging, autofocus systems, electronics assembly, optics positioning, sample positioning, semiconductor inspection, measurement systems, measurement devices.

Specifications

Modell KT180		-50-DC-R	-50-DC-L
Travel	[mm]	50	50
Repeatability unidirectional	[μm]	± 1.1	± 0.5
Repeatability bidirectional	[μm]	± 1.6	± 0.7
Accuracy	[μm]	± 5.5	± 1.8
Flatness	[μm]	± 4	± 4
Straightness	[μm]	± 3	± 3
Positioning speed	[mm/s]	2.5	2.5
Max. speed	[mm/s]	5	5
Max. acceleration	[m/s²]	0.05	0.05
Max. load Fx	[N]	25	25
Max. load Fy	[N]	25	25
Max. load Fz	[N]	60	60
Max. torque Mx	[Nm]	1.3	1.3
Max. torque My	[Nm]	1.3	1.3
Max. torque Mz	[Nm]	1.4	1.4
Pitch	[µrad]	± 70	± 70
Yaw	[µrad]	± 35	± 35
Weight	[kg]	3	3
Length	[mm]	180	180
Width	[mm]	180	180
Motor		DC-Motor	DC-Motor
Feedback		Motor-Encoder	Linearmesssystem

Controllers

FMC 220

Versatile combinable controller, ideal for laboratory applications, control of 1 - 128 axes simultaneously

FMC400/450

Multi-axis controller fully ready for tracking, simple creation of own programs.

PLC

We support integration of our systems into PLC architectures, e.g. Beckhoff

Download

STM_KT180-050-DC-SM_xy_stage_step-file.zip

STM_KT180-050-DC-SM-xy_stage_interface.pdf

Solutions with KT180-DC

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Designs for cleanroom, beam and vacuum

Almost all atmospheric standard systems are anodized with UHV lubrication for residual pressures up to 10E-6 mbar and min. cleanroom class ISO 6 - or even better - available.

Overwiew cleanroom & vacuum systems Contact technical consultants