KLT310-DC
XY Stages

High load XY stage (ball screw), travel 100 x 100 mm, rep ± 0.3 µm, load 28 kg, speed 60 mm/s

High precision XY stage with high load rating

The XY stage combines two highly precise axes achieving outstanding values in accuracy. Its robust structure and travel of 100 mm in the X and Y directions means the KLT310 also enables highaccuracy positioning of heavy loads.
The values of the KLT310 correspond with the special requirements that are of major importance, particularly in measurement engineering.

Ideal for demanding measurement applications

High-precision positioning of loads up to 280 N

Accuracy values up to 0.5 µm due to high-precision spindle axes

Optional with stepper motor, DC motor and in different
measuring system resolutions

Vacuum version available

Fields of application

Metrology, test engineering, surface inspection, inspection systems, inspection of heavy parts, laser processing, micro laser processing, photonics, tool measurement, microscopy

Specifications

Modell KLT310		-100-DC-R	-100-DC-L
Travel	[mm]	100	100
Repeatability unidirectional	[μm]	± 1.5	± 0.3
Repeatability bidirectional	[μm]	± 2	± 0.5
Accuracy	[μm]	± 10	± 1
Flatness	[μm]	± 4	± 4
Straightness	[μm]	± 3	± 3
Positioning speed	[mm/s]	30	30
Max. speed	[mm/s]	60	60
Max. acceleration	[m/s²]	0.5	0.5
Max. load F_x	[N]	45	45
Max. load F_y	[N]	45	45
Max. load F_z	[N]	280	280
Max. torque M_x	[Nm]	6.1	6.1
Max. torque M_y	[Nm]	6.1	6.1
Max. torque M_z	[Nm]	5.6	5.6
Pitch	[µrad]	± 150	± 150
Yaw	[µrad]	± 100	± 100
Length	[mm]	310	310
Width	[mm]	310	310
Height	[mm]	80	80
Motor		DC-Motor
Feedback		Motor-Encoder

Controllers

FMC 220

Versatile combinable controller, ideal for laboratory applications, control of 1 - 128 axes simultaneously

FMC400/450

Multi-axis controller fully ready for tracking, simple creation of own programs.

PLC

We support integration of our systems into PLC architectures, e.g. Beckhoff

Download

STM_KLT310-100-SM-DC-R-L-xy_stage_data-sheet.pdf

STM_KLT310-100_xy-stage_step-file.zip

STM_KLT310-100-SM-DC_xy_stage_interface.pdf

Solutions with KLT310-DC

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Designs for cleanroom, beam and vacuum

Almost all atmospheric standard systems are anodized with UHV lubrication for residual pressures up to 10E-6 mbar and min. cleanroom class ISO 6 - or even better - available.

Overwiew cleanroom & vacuum systems Contact technical consultants