KDT380-DC
XY Stages

XY stage (ball screw), travel 155 x 155 mm, aperture 170 mm, rep ± 0.5 µm, load 11 kg, speed 50 mm/s
KDT380-DC

 

Precision aperture stage for heavy loads

The KDT380 heavy-duty XY stage with aperture enables high-precision positioning of heavy loads up to 20 kg. The use of a free ball screw drive enables maximum precision as well as excellent running behavior, while at the same time providing very high rigidity and a long life time.

Highly compact for a wide range of inspection tasks

  • Ideal for high-precision inspection, microscopy or scanning applications
  • Large Aperture of 170 x 170 mm
  • Very rigid positioning of high loads up to 20 kg

Options:

  • Available with DC motor or stepper motor
  • Different high resolution measuring systems
  • Version for clean room and vacuum on request

    Fields of application

    metrology, high resolution microscopy, 3D inspection, inspection systems, inspection technology, automatic optical inspection (AOI), inline inspection, surface inspection, coating thickness measurement

     

    Modell KDT380   -155-DC-R -155-DC-L -155-SM
    Travel [mm]  155 155 155
    Repeatability unidirectional [µm] ± 2 ± 0.5 ± 1.6
    Repeatability bidirectional [µm] ± 2.5 ± 0.7 ± 2.1
    Accuracy [µm] ± 13.5 ± 3.5 ± 13.2
    Flatness [µm] ± 11 ± 11 ± 11
    Straightness [µm] ± 3.9 ± 3.9 ± 3.9
    Positioning speed [mm/s] 35 35 13
    Max. speed [mm/s] 50 50 20
    Max. acceleration [m/s2] 0.5 0.5 0.2
    Max. load Fx [N] 45 45 45
    Max. load Fy [N] 45 45 45
    Max. load Fz [N] 110 110 110
    Max. torque Mx [Nm] 5.3 5.3 5.3
    Max. torque My [Nm] 5.3 5.3 5.3
    Max. torque Mz [Nm] 5.1 5.1 5.1
    Pitch [µrad] ± 190 ± 190 ± 190
    Yaw [µrad] ± 120 ± 120 ± 120
    Wight [kg] 30 30 30
    Length [mm] 380 380 380
    Width [mm] 380 380 380
    Heigt [mm] 100 100 100
    Aperture [mm] 170 x 170 170 x 170 170 x 170
    Motor   DC-Motor DC-Motor Stepper Motor
    Feedback   Motor-Encoder Linear Scale Open Loop

     

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    Angepasstes System für Ihr Gesamtkonzept

    Your customized system

    Stages for cleanroom and vacuum applications

    Even more stage for your clean room and vacuum applications?

    Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar and clean room class ISO 6 - or even better - available. Click here for the overview of our vacuum and clean room stages!

    Are you looking for a technical solution for your application?

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    Elger Matthes
    Development, Consulting, Concepts, Innovation

    T +49 (0) 351 88585-82
    E-Mail

    Francisco Samuel
    Consulting &
    Project Management

    T +49 (0) 351 88585-85
    E-Mail

    Ronald Schulze
    Consulting, Project Management & Engineering

    T +49 (0) 351 88585-67
    E-mail

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