KDT380-DC
XY Stages

XY stage (ball screw), travel 155 x 155 mm, aperture 170 mm, rep ± 0.5 µm, load 11 kg, speed 50 mm/s

Precision aperture stage for heavy loads

The KDT380 heavy-duty XY stage with aperture enables high-precision positioning of heavy loads up to 20 kg. The use of a free ball screw drive enables maximum precision as well as excellent running behavior, while at the same time providing very high rigidity and a long life time.

Highly compact for a wide range of inspection tasks

Ideal for high-precision inspection, microscopy or scanning applications

Large Aperture of 170 x 170 mm

Very rigid positioning of high loads up to 20 kg

Options:

Available with DC motor or stepper motor
Different high resolution measuring systems
Version for clean room and vacuum on request

Fields of application

metrology, high resolution microscopy, 3D inspection, inspection systems, inspection technology, automatic optical inspection (AOI), inline inspection, surface inspection, coating thickness measurement

Specifications

Modell KDT380		-155-DC-R	-155-DC-L	-155-SM
Travel	[mm]	155	155	155
Repeatability unidirectional	[µm]	± 2	± 0.5	± 1.6
Repeatability bidirectional	[µm]	± 2.5	± 0.7	± 2.1
Accuracy	[µm]	± 13.5	± 3.5	± 13.2
Flatness	[µm]	± 11	± 11	± 11
Straightness	[µm]	± 3.9	± 3.9	± 3.9
Positioning speed	[mm/s]	35	35	13
Max. speed	[mm/s]	50	50	20
Max. acceleration	[m/s²]	0.5	0.5	0.2
Max. load Fx	[N]	45	45	45
Max. load Fy	[N]	45	45	45
Max. load Fz	[N]	110	110	110
Max. torque Mx	[Nm]	5.3	5.3	5.3
Max. torque My	[Nm]	5.3	5.3	5.3
Max. torque Mz	[Nm]	5.1	5.1	5.1
Pitch	[µrad]	± 190	± 190	± 190
Yaw	[µrad]	± 120	± 120	± 120
Wight	[kg]	30	30	30
Length	[mm]	380	380	380
Width	[mm]	380	380	380
Heigt	[mm]	100	100	100
Aperture	[mm]	170 x 170	170 x 170	170 x 170
Motor		DC-Motor	DC-Motor	Stepper Motor
Feedback		Motor-Encoder	Linear Scale	Open Loop

Controllers

FMC 220

Versatile combinable controller, ideal for laboratory applications, control of 1 - 128 axes simultaneously

FMC400/450

Multi-axis controller fully ready for tracking, simple creation of own programs.

ACS

We support integration of our systems into your ACS environment

PLC

We support integration of our systems into PLC architectures, e.g. Beckhoff

Download

STM_KDT380-155-DC-SM_xy_stage_datenblatt_deutsch.pdf

STM_KDT380-155-DC-SM_xy_stage_data-sheet_english.pdf

STM_KDT380-155-DC-SM_xy_stage_step-file.zip

STM_KDT380-155-DC-SM_xy_stage_interface.PDF

Solutions with KDT380-DC

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Designs for cleanroom, beam and vacuum

Almost all atmospheric standard systems are anodized with UHV lubrication for residual pressures up to 10E-6 mbar and min. cleanroom class ISO 6 - or even better - available.

Overwiew cleanroom & vacuum systems Contact technical consultants