KDT310-DC
XY Stages

XY stage (ball screw), travel 100 x 100 mm, aperture 150 mm, rep ± 0.5 µm, load 7 kg, speed 60 mm/s

Scanning stage with large aperture

The space-saving design and large aperture characterize these robust XY stage. High precision ball screws and adjustable othogonality ensure highly precise positioning and running accuracies. At the same time, it impresses with ist good value for money and long lifetime.

Designed for microscopy tasks

Ideal for microscopy, optical inspection systems and laser processing
High-precision repeatability up to 0.5 µm
Good price-performance ratio and very long life cycle
Optional as stepper motor version or with 50 mm travel (KDT235) available

Fields of application

High-resolution applications in microscopy, optical inspection systems, 3-D imaging, screening, interferometry, metrology, autofocus systems, biotechnology, semiconductor testing

Specifications

Modell KDT310		-100-DC-R	-100-DC-L
Travel	[mm]	100	100
Repeatability unidirectional	[μm]	± 1.5	± 0.5
Repeatability bidirectional	[μm]	± 2	± 0.7
Accuracy	[μm]	± 18	± 6.1
Flatness	[μm]	± 7	± 7
Straightness	[μm]	± 5	± 5
Positioning speed	[mm/s]	30	30
Max. speed	[mm/s]	60	60
Max. acceleration	[m/s²]	0.5	0.5
Max. load Fx	[N]	45	45
Max. load Fy	[N]	45	45
Max. load Fz	[N]	70	70
Max. torque Mx	[Nm]	6.1	6.1
Max. torque My	[Nm]	6.1	6.1
Max. torque Mz	[Nm]	5.6	5.6
Pitch	[µrad]	± 150	± 150
Yaw	[µrad]	± 100	± 100
Weight	[kg]	13	13
Length	[mm]	310	310
Width	[mm]	310	310
Height	[mm]	80	80
Aperture	[mm]	150	150
Motor		DC-Motor	DC-Motor
Feedback		Motor-Encoder	Linearmesssystem, Linear Scale

Controllers

FMC 220

Versatile combinable controller, ideal for laboratory applications, control of 1 - 128 axes simultaneously

FMC400/450

Multi-axis controller fully ready for tracking, simple creation of own programs.

PLC

We support integration of our systems into PLC architectures, e.g. Beckhoff

Download

STM_KDT310-100-DC-R-L-xy_stage_data-sheet.pdf

STM-KDT310-100_xy-stage_3D-pdf.PDF

STM-KDT310-100_xy-stage_step-file.zip

STM-KDT310-100_xy-stage_igs-file.zip

STM_KDT310-100-DC_xy_stage_interface.pdf

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Designs for cleanroom, beam and vacuum

Almost all atmospheric standard systems are anodized with UHV lubrication for residual pressures up to 10E-6 mbar and min. cleanroom class ISO 6 - or even better - available.

Overwiew cleanroom & vacuum systems Contact technical consultants