KDT180-PM
XY Stages

High-precision XY piezo stage, travel 100 x 100 mm, aperture 115 mm, rep ± 0.3 µm, load 5 kg, speed 7 mm/s

High precision XY stage with aperture

Equipped with piezo motors, the KDT180 is impressive with the smallest increments and high resolution. The XY stage achieves high speed at the same time as high positioning resolution. This XY system is also available as a high vacuum, ultra-high vacuum and non-magnetic version for demanding ambient conditions.

Suitable for demanding environments

Ideal for microscopy, research and development and experimental physics

High-precision repeatability up to 0.3 µm

Optional with nanomotion, stepper motor or DC motor

Vacuum version (HV / UHV) and non-magnetic variants available

Fields of application

High resolution microscopy, scanning microscopy, 3D imaging, screening, vacuum chambers, interferometry, metrology, autofocus systems, biotechnology, semiconductor testing, research, experimental physics, electronics assembly, optics positioning, sample positioning

Specifications

Modell KDT180-PM		-100-PM
Travel	[mm]	100
Repeatability unidirectional	[μm]	± 0.3
Repeatability bidirectional	[μm]	± 0.4
Accuracy	[μm]	± 8
Flatness	[μm]	± 10
Straightness	[μm]	± 7.5
Positioning speed	[mm/s]	5
Max. speed	[mm/s]	7
Max. acceleration	[m/s²]	0.1
Max. load Fx	[N]	10
Max. load Fy	[N]	10
Max. load Fz	[N]	55
Max. torque Mx	[Nm]	0.9
Max. torque My	[Nm]	0.9
Max. torque Mz	[Nm]	0.7
Pitch	[µrad]	± 250
Yaw	[µrad]	± 150
Weight	[kg]	3
Length	[mm]	230
Width	[mm]	230
Height	[mm]	50
Aperture	[mm]	115 x 115
Motor		Piezo Motor
Feedback		Linearmesssystem, Linear Scale

Controllers

FMC400/450

Multi-axis controller fully ready for tracking, simple creation of own programs.

PLC

We support integration of our systems into PLC architectures, e.g. Beckhoff

Download

STM_KDT180-100-PM-L_xy-stage_data-sheet.pdf

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Designs for cleanroom, beam and vacuum

Almost all atmospheric standard systems are anodized with UHV lubrication for residual pressures up to 10E-6 mbar and min. cleanroom class ISO 6 - or even better - available.

Overwiew cleanroom & vacuum systems Contact technical consultants