KDT105-PM
XY Stages

XY piezo scanning stage, travel 50 x 50 mm, aperture 50 mm, rep ± 0.3 µm, load 5 kg, speed 7.5 mm/s

Compact XY aperture stage for demanding environments

Equipped with Piezo motor, the XY Stage with aperture and cross roller bearings achieves smallest steps in the nanometer range with an almost unmatchable positional stability. Considering its size of 150 x 150 x 50 mm, it has a large travel range of 50 mm in the X and Y directions.

High repeatability up to ± 0. 3 µm

Large aperture of 40 x 40 mm

Flexibly adaptable for demanding environmental conditions

Options:

With and without aperture
Version with nanomotion or piezo motor
Flexibly combinable with XYZ-R multi-axis systems e.g. DT105 rotary stage, HT160 lifting stage, MT105
Different variants for clean room, radiation, vacuum and magnetism

Fields of application

High-resolution applications in microscopy, semiconductor inspection, bioprinting, super-resolution microscopy, scanning microscopy, 3D imaging, screening, vacuum chambers, semiconductor testing, research, experimental physics, cancer cell research

Specifications

KDT105		-50-PM-L
Travel	[mm]	50
Repeatability unidirectional	[μm]	± 0.3
Repeatability bidirectional	[μm]	± 0.4
Accuracy	[μm]	± 4
Flatness	[μm]	± 4
Straightness	[μm]	± 3
Positioning speed	[mm/s]	5
Max. speed	[mm/s]	7.5
Max. acceleration	[m/s²]	0.1
Max. load Fx	[N]	5
Max. load Fy	[N]	5
Max. load Fz	[N]	45
Max. torque Mx	[Nm]	0.7
Max. torque My	[Nm]	0.7
Max. torque Mz	[Nm]	0.6
Pitch	[µrad]	± 180
Yaw	[µrad]	± 50
Length	[mm]	150
Width	[mm]	150
Height	[mm]	50
Weight	[kg]	2.5
Aperture	[mm]	40 x 40
Bearing		Cross Roller Bearings
Motor		Piezo Motor
Feedback		Linear Scale
Resolution Measuring system		0.005, optionally up to 0.001 µm
Material		Anodized Aluminum
Optional features		rotary stage DT105, Z stage HT160 / MT105, custom adapter, bore grid, cable / plugs
Variants clean room		up to clean room class ISO 4 (higher on request)
Variants beam		UV, DUV, EUV (X-ray, gamma on request)
Variants Magnetism		magnetic, low-magnetic, magnet-free
Variants vacuum		up to 10E-11 mbar (higher in request)

Controllers

FMC400/450

Multi-axis controller fully ready for tracking, simple creation of own programs.

PLC

We support integration of our systems into PLC architectures, e.g. Beckhoff

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Designs for cleanroom, beam and vacuum

Almost all atmospheric standard systems are anodized with UHV lubrication for residual pressures up to 10E-6 mbar and min. cleanroom class ISO 6 - or even better - available.

Overwiew cleanroom & vacuum systems Contact technical consultants