Coil system for rotary lifting drive
Smorgasbord
A turntable with direct drive is made of a lot of coils and magnets. Wouldn't it be great to use the already existing magnet coil setup to produce a lifting force as well? That actually works. With compromises regarding efficiency - however, good enough for lifting and turning wafers in production.
201/5000 Even more axes for your vacuum applications
Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!
Overwiew standard stages Contact technical consultants
Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
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