XYZ Positioning System for wafer inspection up to 12 inch / 300 mm (cleanroom ISO 6) | travel 305 x 305 x 200 mm
Inspection and Mikroscopy

782453:030.26.oem

Modular XYZ positioning system for wafer inspection

This inspection system consists of the XY-Stage KT470 on a granite structure with a manual Z-vertical unit. This combination is suitable for the flexible and modular design of production systems / inline processes for cleanrooms and can be optionally extended with rotary or motorized Z-axes.

Ideal for flexible inspection processes of wafers up to 12 inch / 300 mm

Holder for exchangeable process heads (microscope, sensor, ...)

Various scanning ranges and manual height adjustment (optionally motorized with motion controller)

Low maintenance for 24/7 production up to cleanroom class ISO 6 (higher on request)

Options:

Extendable travel range XY 200 - 350 mm, Z 200 - 400 mm
Adaptation to the process: aperture, sample holder, extension of additional (motorized) Z-axes
Adapted vibration decoupling by means of damping rubber intermediate layer or pneumatic dampers
Safety concept and technology (emergency stop, door switch, light curtain, laser scanner, STO, SLS)
Customized design with frame, enclosure or integration into the fab
Customer-specific development with 3D design, prototypes, series production

Fields of application

Wafer inspection up to cleanroom ISO 6 (sample size up to 12 inch / 300 x 300 mm), wafer metrology, interferometry and metrology, microscopy, material testing, probecards and printed circuit boards, quality assurance, microscopy in the cleanroom, surface inspection, surface testing, examination of deposits, scratches, irregularities on the surface

Specifications

782453:030.26		X	Y	Z
Standard System		KT470-SM	KT470-SM	-
Travel	[mm]	305	305	200
Repeatability unidirectional	[µm]	± 2.3	± 2.3	14,28571429
Repeatability bidirectional	[µm]	± 3.3	± 3.3	20
Positioning speed	[mm/s]	20	20	-
Max. speed	[mm/s]	40	40	-
Max. load	[N]	227	227	196
Weight	[kg]	325
Max. sample dimension	[Ø]	12 inch / 300 mm
Length x width x height	[mm]	500 x 950 x 740
Spindle type		Ball Screw 1214.511/1.12.361.412 P5P / 225177		Lead Screw
Spindle lead		1	1
Guide		cross roller brearings	cross roller brearings
Motor		Stepper Motor	Stepper Motor	Handwheel
Feedback		Open Loop	Open Loop
Optional features		Travels 200 - 350 mm, adaption plate, chuck, base plate (granite / aluminum), frame, housing, custom vibration decoupling by damping rubber pad or pneumatic damper, safety concept and installation (emergency stop, door switch, safety light curtains, laser scanner, STO, SLS)
Clean room variants		up to clean room class ISO 6 (higher on request)
Beam variants		UV (DUV, EUV, X-ray, gamma on request)