XYZ positioning system for optical inspection of wafers, PCBs, probe cards (clean room) | Stroke 200 x 200 mm
Inspection and Mikroscopy

782300:265.26

Highly stable non-contact optical measurement.

This XY combination has a separate Z-vertical unit to mount a custom microscope, camera or sensor. The KT310 cross-stage with stepper motor on the granite plate moves the wafer under inspection to the microscope with high precision and enables stable and high-resolution imaging. Its concept with internal motors, cross roller guides and high-precision ball screws enables outstanding precision with optimum use of the installation space.

High-precision analysis of the smallest details

Ideal for optical inspection of wafers, printed circuit boards and probe cards

Easily apaptable to various custom microscopes, cameras or senors

High precision surface inspection of wafers up to 200 x 200 mm

Low maintenance and with optimized price-performance ratio due to stepper motor drive

Optional extensions:

Other travels and lengths
With/without frame and base plate made of granite or aluminum
Versions ISO 14644-1 (up to class 1 on request) e.g. with enclosure and with exhaust system
Individual solutions for cable routing
Adapted vibration decoupling by means of damping rubber layer or pneumatic dampers
Integration into the customer-specific overall application

Individual extensions and customizations

Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests

Fields of application

Inspection and microscopy of wafers, chips, die, pins, bonding, printed circuit boards, solar cells, solar panels, laser, surface inspection, examination of deposits, scratches, irregularities on the surface

Specifications

782300:265.26		X	Y	Z
Used standard system		KT310	KT310
Travel	[mm; deg]	200	200
Repeatability unidirectional	[µm; deg]	± 3	± 3
Repeatability bidirectional	[µm; deg]	± 5	± 5
Positioning speed	[mm/s]	30	30
Max. load	[N]	110	110
Motor		Stepper Motor	Stepper Motor
Feedback		Open Loop	Open Loop