Double XYZ wafer positioner for scanners, microscopes and wafers up to 12 inch / 300 mm (clean room ISO2) | Stroke 720 x 720 x 100 mm
Inspection and Mikroscopy

782430:002.26.oem

High throughput screening of wafers up to 12"

The inspection system with travel ranges up to 720 mm provides simultaneous high dynamic inspection of multiple 300 mm / 6" wafers. The completely ready-to-use motion system, consisting of the axes, the granite base with gantry, the cable management and the motion controller can be individually configured according to the customer's requirements.

Automated inspection in 3-shift operation

Ideal for automated inspection of wafers with:
- 2x X-axes each for scanners / microscopes up to 25 kg
- 2x Y-axes each for chucks / sample carriers up to 23 kg

Highly dynamic positioning up to max. 1000 mm/s with travel ranges up to 720 mm

Designed for use in 3-shift operation up to clean room class ISO 2

Low maintenance due to fast system replacement on the granite structure

Optionally expandable:

Version for clean room ISO 14644-1 (up to class 1 on request)
Connections for exhaust and revolving belt covers
Available also as single portal
Ready-to-use control system with pre-configured controller incl. sample software
Individual solution development with 3D design for the positioning task

Individual extensions and customizations

Engineering services include the fitting of the systems to your structure and the desired motion control or the completely individual solution development with 3D design for the application-specific positioning task.

Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests.

Fields of application

Wafer and mask inspection up to 12 inch / 300 mm, Metrology, Microscopy, Materials inspection, probe cards and printed circuit boards, AOI, quality assurance, microscopy of large sample, surface inspection, measurement of chips, measurement of complicated geometric shapes

Specifications

782430:002.26		X	Y	Z
Standard System		PMT290-EDLM	PMT290-EDLM	0
Travel	[mm]	720	720	100
Repeatability unidirectional	[µm]	± 0.3	± 0.3	± 1.5
Repeatability bidirectional	[µm]	± 0.7	± 0.7	± 2.5
Positioning speed	[mm/s]	750	750	150
Max. speed	[mm/s]	1500	1500	300
Max. load	[N]	150	150	± 200
Max. sample dimension	[Ø]	12 inch / 300 mm
Length x width x height	[mm]	1230 x 1200 x 1030
Drive		Linear Motor	Linear Motor	Servo Motor, Ball Screw
Motor		Ironless Dynamic Linear Motor	Ironless Dynamic Linear Motor	AC Servo
Feedback		Linear Scale	Linear Scale	Motor Encoder
Clean room variants		up to ISO class 2
Beam variants		on request