XYZ positioning system for automated inspection - wafer / probe cards (clean room) | Stroke 720 x 720 x 100 mm
Inspection and Mikroscopy

782300:148.26.oem

High-precision quality inspection for cleanroom applications

This inspection system (shown here without cover) is specially designed for automated quality control of large wafers, probe cards and printed circuit boards. A high-resolution camera or sensor in Z is movable relative to the sample or carrier on the linear stage. Operation is controlled by a separate motion controller for the three axes.

Increased throughput by automated 24/7 inspection

Simultaneous inspection of wafers, probe cards and printed circuit boards through travels up to 720 mm

Reduced cycle time with speeds up to 150 mm/s and accelerations of 2 m/s²

Precise measurement results and enormous quality improvements with repeatability up to 1 µm

Low-maintenance 24/7 operation and flexible maintenance due to fast system exchange on the granite structure

Optionally expandable:

Various travels up to 720 mm
Version for clean room ISO 14644-1 class 2 (up to class 1 on request)
Optionally with motorized Z-axis
Connections for dust extraction and rotating belt covers
With/without frame and base plate made of granite or aluminum
Integration into the customer specific application
Ready-to-use with pre-configured motion controller incl. exemplary software

Individual extensions and customizations

Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests

Fields of application

Inspection of large wafers, probe cards and printed circuit boards, AOI, quality assurance, microscopy of large sample, surface inspection, measurement of chip, measurement of objects on complicated geometric shapes

Specifications

782300:148.26		X	Y	Z
Standard system used		PMT290-EDLM	PMT290-EDLM
Travel	[mm; deg]	820	820	100
Repeatability unidirectional	[µm; deg]	± 0.3	± 0.3	± 1.5
Repeatability bidirectional	[µm; deg]	± 0.4	± 0.7	± 2.5
Positioning speed	[mm/s; deg/s]	750	750	150
Max. speed	[mm/s; deg/s]	1500	1500	300
Max. Load	[N]	150	150	± 200
Motor		Ironless Dynamic Linear Motor	Ironless Dynamic Linear Motor	AC Servo
Drive				Ball Screw
Feedback		Linear Scale	Linear Scale