X Phi positioning system for inspection of wafers, biological samples (clean room ISO 5) | rotary axis and linear stage
Inspection and Mikroscopy

782424:005.26

High-precision linear-rotatory positioning

This X Phi system allows the positioning of samples (e.g. wafers, biological samples) at a precisely defined angle to the sensor or camera. It consists of a linear X-axis, the precise standard linear stage PMT160 with ball screw, and an integrated rotary unit with unlimited travel, driven by flat belts.For cleanroom suitability, the cable guides for both the centered measuring system and the moving rotary unit were housed within the linear system enclosure. Bellows seal off the system from the outside to prevent particle emission.

Maintenance-free positioning system for clean rooms

Ideal for inspection tasks in semiconductor technology, biotechnology and the pharmaceutical industry

High precision measurement with repeatability up to 0.3 µm

Excellent flatness of the linear stage enables high-precision coating thickness measurement with only one sensor

Reduction of particle emission to ISO class 5 by housing and bellows

Maintenance-free, industrial continuous operation and simple system exchange on the base plate

Optional expandable:

Further versions for clean room ISO 14644-1 (up to class 1 on request)
Base plate made of granite or aluminum
Hermetically sealed special motors with pharmaceutical approval
Adaptable for further travels and different samples
Versions for extreme environmental conditions e.g. radiation, vacuum
Expandable to customer specific complete application
Immediate use with pre-configured controller incl. exemplary software

Individual extensions and customizations

Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests

Fields of application

This system has now been supplied in several variants for various cross-industry applications over many years as a series for e.g.: Manufacturing / inspection / quality assurance of small medical components, pharmaceutical inspection, measurement of biological samples, alignment and inspection of optical components, assembly systems in microelectronics, AOI (Automatic Optical Inspection), chipping / crack / defect detection, surface inspection, layer thickness measurement with one sensor, inspection of wafers, chips, die, pins, bonding, printed circuit boards, solar cells

This system was developed for the first time for high-precision layer thickness measurement of wafers with only one sensor. The chuck is rotated on the rotary stage and moved into measuring position to optically measure the surface of the rotating wafer with one sensor. In addition, this can be moved to the customer-specific loading station for increased process automation.

Specifications

782424:005.26		X	Phi
Travel	[mm; deg]	200	n x 360
Repeatability unidirectional	[µm; deg]	± 0.3
Repeatability bidirectional	[µm; deg]	± 0.4
Max. load Fz	[N]	150	150
Positioning speed	[mm/s; deg/s]	25	200
Motor		Stepper Motor	Stepper Motor
Drive		Ball Screw	Belt
Feedback		Linear Scale	Open Loop