XYZ Phi inspection system suitable for 12 inch wafers, printed circuit boards (clean room ISO 2)
Inspection and Mikroscopy

782300:199.26

Universal 4-axis granite gantry with cleanroom housing

This XYZ Phi positioning system can be used for various test and inspection processes in semiconductor and electronics manufacturing up to cleanroom class ISO 2. Due to the design of the travels up to 320 x 320 mm in XY, it is suitable for all standard wafer sizes up to 12 inches. Samples are manipulated with high precision to a laser, sensor or camera in the Z-axis using the linear motor-driven KT405-320-EDLM mechanical stage. The sensor or camera is adjusted in vertical movement (maximum 50 mm) with the PMT160-050-DC-R/L precision measuring stage, which can optionally be added with a swivel unit.

High-precision testing in demanding cleanrooms

Ideal for demanding test and inspection processes in semiconductor technology, biotechnology and the pharmaceutical industry

Fast adaptation to different measurement and testing tasks

High-precision measurement with repeatability up to 0.3 µm at high speeds up to 100 mm/s

Safety concept with protective cover

Emission-free up to clean room ISO class 2

Delivery of the system with granite base on dampers, steel frame incl. control complete with protective hood and painted housing

Optionally expandable:

ISO 14644-1 versions (up to class 1 on request)
Swivel arm for sensor with rotary axis DT200
Base plate made of granite or aluminum
Other travels and different samples
Adaptable for integration into automated processes
Immediate use with pre-configured controller incl. exemplary software

Individual extensions and customizations

Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests

Fields of application

Assembly / inspection / quality assurance of 12 inch wafers, chipping / crack / defect detection, surface inspection, layer thickness measurement with one sensor, inspection of chips, dies, pins, bonding, printed circuit boards, solar cells

Specifications

782300:199.26		X	Y	Z	Phi
Travel	[mm; deg]	320	320	50	20
Repeatability unidirectional	[µm; deg]	± 0.3	± 0.3	± 0.3	0.004
Repeatability bidirectional	[µm; deg]	± 0.4	± 0.4	± 0.4	0.006
Positioning speed	[mm/s; deg/s]	100	100	3.4	30
Max. load	[N]	15	15	± 150	68
Motor		Ironless Dynamic Linear Motor	Ironless Dynamic Linear Motor	DC-Motor	DC-Motor
Feedback		Linear Scale	Linear Scale	Linear Scale