6-axis semiconductor inspection positioning system (clean room class ISO 4) | travel XYZ 30 x 30 x 20 mm, RxRy 4°, Rz 360°
Inspection and Mikroscopy

786015:001.26

6-axis positioning for semiconductors

This 6-axis positioning system provides precise and highly compact alignment of a heavy processing head, e.g. microscope, and the sample. It is mounted directly onto an existing customer-specific machine base (wafer prober). The microscope is attached to a traverse across the aligner. It consists a XY Stage in the horizontal and a tripod for vertical travel and two tilts, and combines the strengths of Cartesian as well as parallel kinematic designs in one system plus continuous rotation on Z.

Ideal for automated inspection of wafers and optics up to 300 mm / 12"

Highly compact and rigid positioning on 720 x 600 x 552 mm (dimensions)

Designed for use in 3-shift operation up to clean room class ISO 4

Options:

Motorized XYZ positioning stage for the microscope
Special version for samples up to 450 mm / 18"
Various versions for cleanroom ISO 14644-1 (up to class 1 on request)
Modular multi-axis system with customer-specific / interchangeable processing heads
Adaption to sample holders / carrier, integration into workflows
Application-specific testing and ready to use motion controller incl. sample software
Customized development with 3D design, prototypes, series production

Fields of application

Semiconductor inspection, MEMS prober testing, alignment, wafer, optics, manipulator, parallel kinematics, testing and bonding on wafers and PCBs, combinations of optical inspection and processing, e.g. for chip-on-board bonding (measuring microscope and laser soldering)

Specifications

786015:009.26		X	Y	Z	Rx	Ry	Rz
Standard System		MT95	MT95	3x MT95	3x MT95	3x MT95
Travel	[mm; deg]	30	30	20	4	4	360 x n
Repeatability unidirectional	[µm; deg]	± 1.5	± 1.5	± 1.5	0.0004	0.0004	0.05
Repeatability bidirectional	[µm; deg]	± 3.5	± 3.5	± 3.5	0.001	0.001	0.1
Positioning speed	[mm/s; deg/s]	1.1	1.1	1.1	0.3	0.3	100
Max. speed	[mm/s; deg/s]	2	2	2	0.5	0.5	200
Max. load	[N]	65	65	100	65	65	20
Motor		DC-Motor	DC-Motor	DC-Motor	DC-Motor	DC-Motor	Stepper Motor
Drive		Ball screw 1112, Gear Box, Belt	Ball screw 1112, Gear Box, Belt	Ball screw 1112, Gear Box, Belt	Ball screw 1112, Gear Box, Belt	Ball screw 1112, Gear Box, Belt	Belt
Feedback		Motor-Encoder	Motor-Encoder	Motor-Encoder	Motor-Encoder	Motor-Encoder	-
Aperture diameter	[mm]	250 (optional larger as special version)
Max. sample diameter	[mm] [inch]	300 12 (450 mm / 18" optional as special version)
Length x width x height	[mm]	720 x 600 x 552