High precision automatic 3D inspection of semiconductors

This 3-axis positioning system moves a high-resolution camera or sensor on the Z-axis over the target. Based on the LA250 linear axis with linear direct drive, this system achieves high speeds and accelerations with high precision and very good reproducibility. For vertical positioning, the high-precision PLT165-AC linear stage with a powerful AC servo motor is used to drive its precision ball screw. It has a high payload capacity, even for heavy sensors.  

High throughput in low-maintenance 24/7 operation

Individual extensions and customizations

Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests

Fields of application

Manufacturing / inspection / quality assurance of small components, inspection of probe cards, wafers, chips, die, pins, bonding, printed circuit boards, solar cells, chipping / crack / defect detection, surface inspection, layer thickness measurement with one sensor, pharmaceutical inspection, measurement of biological samples, alignment and inspection of optical components, setup of assembly systems in microelectronics, AOI (Automatic Optical Inspection)