Double XY linear axis for high-precision adjustment of lenses for wafer steppers | ultra-fine UV exposure in the clean room
Precision Assemblies and Components

782344:025.26

High precise adjustment of two optics

This high-precision double linear axis was developed especially for wafer steppers. Two lenses should be positioned relative to each other and also together with each other to realize even finer structures during UV exposure. This solution consists of two sliding axes on a common guide system. Two moving sliding carriages have three carriages each, which allows them to move partially within each other in order to bring the lenses together as closely as possible.

Ultrafine imaging in extremely dry environment

Specifically developed to maximize yield and resolution of wafer stepper systems

Simultaneous positioning of lenses to each other as well as with each other over a travel distance of 350 mm

Repeatability of 1.5 µm under extremely dry cleanroom conditions

Easy maintenance due to a replaceable motor encoder assembly

Special features:

UV compatibility
Polished surfaces
Versions for cleanroom ISO 14644-1 (up to class 1 on request)
Immediate use with pre-configured controller incl. exemplary software

Detailed measurement protocols

This series assembly is manufactured many hundreds of times per year. All accuracy-relevant parameters are verified by a measuring stand after assembly. This measuring stand is located in the clean room and records accuracy, repeatability, straightness, flatness as well as current consumption. Additional checks are carried out to ensure minimal play in the bearings and smooth running of the drive system.

Individual extensions and customizations

Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests

Further Applications

High precision lens alignment, wafer alignment, wafer positioning, sensor alignment

Specifications

782344:025.26		X	Y
Travel	[mm; deg]	350	350
Repeatability unidirectional	[µm; deg]	± 1.5	± 1.5
Repeatability bidirectional	[µm; deg]	± 2.5	± 2.5
Positioning speed	[mm/s; deg/s]	100	100
Max. load	[kg]	4	4
Length	[mm]	486
Width	[mm]	192
Height	[mm]	63
Motor		DC-Motor	DC-Motor
Drive		Ball Screw	Ball Screw
Feedback		Motor-Encoder	Motor-Encoder