XXL XYZ Portal with Vacuum Chuck | XY Stepper Motor, Ball Screw, Profile Rail, Linear Scale | Z Cross Roller | Travel 1000 x 1000 x 100 mm
Portals

782300:179.26

High-precision metrology tasks on 1000 x 1000 mm

This positioning system moves a vacuum chuck on an area of 1000 x 1000 mm. The standard system PMT160-SM is fixed to the traverse axis for the customerspecific sensor, which is used for the focus variation. The axes are fully enclosed, which prevents contamination and interference.

Automated inspection in 3-shift operation

Ideal for automated surface inspection with focus variation

Designed for sample weights up to 50 kg (excluding vacuum stage)

Passive vibration damping and decoupling of building vibrations (standard measuring chamber quality class 3 according to VDI 2627)

Enormously long lifetime with 1,000,000 full cycles and a maintenance interval of 500,000 full cycles resp. every 2 years

Optionally expandable:

With linear scale for accuracies up to 0.3 µm
Modular system configuration
Safety cabinet
Special configuration for semiconductors, biotechnology, pharmaceuticals
Versions for clean room ISO 14644-1 (up to class 1 on request)
Ready-to-use motion control with pre-configured controller incl. sample software
Individual solution development with 3D design for the positioning task

Individual extensions and customizations

Engineering services include the fitting of the systems to your structure and the desired motion control or the completely

Specifications

782300:179.26		X	Y	Z
Standard System		PLT320-SM	PLT320-SM	PMT160-SM
Travel	[mm]	1000	1000	100
Repeatability unidirectional	[µm]	± 3.9	± 3.9	± 1.9
Repeatability bidirectional	[µm]	± 4.4	± 4.4	± 2.4
Positioning speed	[mm/s]	30	30	10
Max. load	[N]	490	490	± 45
Motor		Stepper Motor	Stepper Motor	Stepper Motor
Drive		Ball Screw	Ball Screw	Ball Screw
Guide		Profile Rail	Profile Rail	Cross roller bearings
Feedback		Open Loop	Open Loop	Open Loop
Length x width x height	[mm]	2250 x 1500 x 1500