Rz-X-Y-Ry-Rx | Z-R-F 8-axis positioner for inspection of optics | aperture rotary stage and aligner 45 mm | stroke 360°, 2 x 2 x 25 mm, 90°, 50 mm
Portals

417815.2022.W3.AB

8-axis adjustment for various inspection angles

This positioning system allows tangential scanning in 6 degrees of freedom with a very high repeatability. The sample holder, which is adjustable in focus, angle and distance, is located on an XYZ phi delta aligner with aperture, which corrects for tilt and lateral offset in 4 axes. Combined with the aperture rotary stage below, additional 360° rotations and incident and transmitted light measurements are possible. A very stiff vertical stroke support a manual angle adjustment with motorized distance adjustment for the sensor, which also operates as a focus.

Ideal for 2D transmission measurements

Ideal for tangential scanning with versatile adjustment options

Correction of tilt and lateral offset up to 0.5 µm

Aperture of 45 mm for the beam line

Air-bearing rotary stage for accuracies up to 0.0005°

Options:

Combinable standard stages for XYZ-Rx-Ry-Rz motions
Individual configuration with frame, vibration isolation, enclosure
Process adaptation for sensor/measuring head, sample holder
Version for clean room, laboratory and production
Wireless power and signal transmission
Integration into workflows via PLC or PC controller
Individual solution with 3D design for the positioning task

Individual extensions and customizations

Engineering services include the fitting of the systems to your structure and the desired motion control or the completely

Specifications

417815.2022.W3.AB		Rz _sample	X _sample	Y _sample	Rx _sample	Ry _sample	R _sensor	F _sensor	Z _sensor
Standard System		DT250	MP200-5	MP200-5	MP200-5	MP200-5		PMT160-DC-L	PLT165-SM
Travel	[mm; deg]	n x 360	± 2	± 2	± 1.5	± 1.5	90	50	100
Repeatability unidirectional	[µm; deg]	0.0005	± 0.5	± 0.5	± 1.3	± 1.3	1	± 0.3	± 3.9
Repeatability bidirectional	[µm; deg]	0.001	± 2	± 2	± 5.2	± 5.2	1	± 0.4	± 4.4
Positoning speed	[mm/s; deg/s]	700	0.5	0.5	0.4	0.4		30	40
Max. speed	[mm/s; deg/s]	1400	1	1	0.8	0.8		60	80
Max. load	[N]					20		40	150
Motor		Iron Core Dynamic Linear Motor	Stepper Motor	Stepper Motor	Stepper Motor	Stepper Motor	manually	DC Motor	Stepper Motor
Guide		Air Bearing	Solid State	Solid State	Solid State	Solid State	Sliding Guide	Cross Roller Bearings	Profile Rail
Drive			Gear Box, Lead Screw	Gear Box, Lead Screw	Gear Box, Lead Screw	Gear Box, Lead Screw		Ball Screw	Ball Screw
Feedback		Angular Scale	Open Loop	Open Loop	Open Loop	Open Loop	Scale	Linear Scale	Open Loop
Aperture	[mm]	Ø 45 mm
Length x width x height	[mm]	600 x 600 x 880