Highly stable AFM air bearing gantry with large travel ranges

This very rigid XYZ gantry is specially designed for high-precision atomic force microscopy (AFM) examination of particularly large glass samples. Above the u-shaped sample platform is a movable cantilever in Z for the customized AFM.

The cantilever can be precisely aligned with the sample and moved to any point within the U-shape for surface relief acquisition. The air bearing provides excellent in-plane positioning accuracy. The maximum sample weight is 500 kg.

Atomic stability for demanding measurements

Maintenance-free and stable due to air bearing technology

The crosshead moves on specially developed air bearings. It floats on an approx. 5 µm thick air gap and thus operates practically contact-free and wear-free. This guarantees a very long lifetime. With the aid of the air bearings, extreme rigidity can be achieved. As soon as the measuring head is brought into position, the air is released from the bearings and the system is fixed by its internal preload. Also, the entire mass of the transverse axis then rests directly on the base granite for maximum stability. Optionally, feet can be mounted under the granite as extra vibration dampers to further protect the system from building vibrations.

Individual extensions and customizations

Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests

Fields of application

Positioning system Atomic Force Microscope, Surface analysis, Surface relief analysis, Wafer inspection, Material science

References

2020/10 Press release "Small all the way"