MP700-3 Flat 3D Aligner | XYRz linear motor, air bearing | Aperture 730 mm | Load 28 kg | Travel 5 x 5 mm x 5°
Compact Multi Axis Stages

782459:003.26

Parallel kinematic 3D aligner with large aperture

With this aligner, second translational motions of ± 5 mm in the plane and a rotation around the vertical of ± 3° are realized. The motion R (Phi) is the result of the XY combination of axes. The aligner is designed for loads up to 28 kg.

Ideal for high-precision alignment of large substrates, masks, frames

Suitable for large samples with an aperture of 730 x 730 mm

High repeatability up to 0.4 µm / ± 0.0002° for loads up to 28 kg

Ultra flat design of 990 x 1090 x 225 mm

Low-maintenance and low-particle by air bearing and direct drive

Options:

Adaptation to the process: aperture, holder, feeder, extension of Z-Motion
Configuration for clean room ISO 14644-1 up to class 5 (higher on request)
Individual design with rack, vibration isolation, enclosure
Individual solution development with 3D design for the positioning task

Individual extensions and customizations

Engineering services include the fitting of the systems to your structure and the desired motion control or the completely individual solution development with 3D design for the application-specific positioning task.

Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests

Fields of application

Positioning of large substrates, masks, frames, screens, printing plates in a low-particle environment, semiconductor printers for applying layer components, UV printers, semiconductor inspection, semiconductor alignment, alignment of samples, analysis, incident and transmitted light measurements, transfer measurements

Specifications

782459:003.26		X	Y	Rz
Travel	[mm; deg]	± 5	± 5	± 3
Repeatability unidirectional	[µm; deg]	± 0.4	± 0.4	± 0.0002
Repeatability bidirectional	[µm; deg]	± 0.7	± 0.7	± 0.0003
Positioning speed	[mm/s; deg/s]	50	50	10
Max. speed	[mm/s; deg/s]	100	100	20
Max. Load	[N]	5	5	100
Weight	[kg]	63
Length x width x height	[mm]	990 x 1090 x 225
Aperture		730 x 730
Guide		Air Bearing	Air Bearing	Air Bearing
Motor		Ironless Dynamic Linear Motor	Ironless Dynamic Linear Motor	Ironless Dynamic Linear Motor
Feedback		Linear Encoder	Linear Encoder	Linear Encoder
Material		Anodized Aluminum
Variants clean room		up to clean room class ISO 5 (higher on request)
Variants beam		UV
Variants magnetism		magnetic