MT130-3-3 Miniature 6-Axis Aligner, cartesian linear motion with eucentric rotary adjustment | Travel XYZ 50 x 50 x 50 mm, Rxyz 4 x 4 x 4°.
Compact Multi Axis Stages

782474:003.26
MT130-3-3 Miniature 6-Axis Aligner, cartesian linear motion with eucentric rotary adjustment | Travel XYZ 50 x 50 x 50 mm, Rxyz 4 x 4 x 4°. - Compact Multi Axis Stages

 

Highly compact 6-axis aligner

This manipulator combines the linear motions of the MP130 with three additional rotary motions of ± 2 degrees.

  • µm precision due to high rigidity
  • good performance values
  • minimal frictional resistance due to cross roller bearings

Options:

  • Optional with stepper motor
  • Additional sample holder and rotary stage
  • Design for cleanroom, laboratory or production
  • Customized development with 3D design, prototypes, series production

Fields of application

Highly compact alignment in 6 degrees of freedom, e.g. fiber alignment, micromachining and microassembly, in research and development, special machine construction, alignment of optical components/parts, automated wafer tests, assembly and connection techniques in silicon photonics

 

MP130-3-3   X Y Z Rx Ry Rx
Standard System   MP130-DC MP130-DC MP130-DC      
Travel [mm; deg]  50 50 50 4 4 4
Repeatability unidirectional [µm; deg] ± 2.5 ± 2.5 ± 2.5 ± 0.0015 ± 0.0015 ± 0.0015
Repeatability bidirectional [µm; deg] ± 4.5 ± 4.5 ± 4.5 ± 0.0025 ± 0.0025 ± 0.0025
Positioning speed [mm/s; deg/s] 30 30 30 2 2 2
Max. speed [mm/s; deg/s] 60 60 60 4 4 4
Max. load [N]       5 5 5
Length x width x height [mm] 288 x 180 x 185
Weight [kg] 15
Drive   Ball Screw 1214.527/2.8.78.103 P3P, Belt Eccentric
Lead   2 mm      
Bearing   Cross Roller Bearing      
Motor   DC Motor
Feedback   Motor Encoder
Material   Anodized Aluminum
Optional features   optional with stepper motor (repeatability unidirectional ± 2.3 µm / bidirectional ± 4.3 µm), sample holder, rotary stage, custom adapter, bore grid, cable / plugs
Variants cleanroom  up to clean room class ISO 6 (higher on request)
Variants beam   UV, DUV (EUV, X-ray, gamma on request)
Variants Magnetism magnetic (low-magnetic on request)
Variants vacuum    up to 10E-6 mbar (higher on request)

 

Used Standard Components

MT130-DC

Linear Stage 130 x 130 x 43 mm, Travel up to 80 mm, Rep 0.7 µm, Load 9 kg, Speed 60 mm/s

KGT 1214

Cylindrical nut with 4-point-contact and internal ball return

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Your customized system

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Katja Weißbach
Consulting
 

T +49 (0) 351 88585-64
E-mail

Francisco Samuel
Consulting &
Project Management

T +49 (0) 351 88585-85
E-Mail

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