Smallest positioning increments in X and Y and rotation around Z

Phi-XY System with Piezo Motor

Small manipulator for xy movement and rotation. Linear travel is 10 mm and ± 5 degrees in rotation. Extremely high resolution in the range on nm through piezo drives. The rotation is being realized by a linear stage acting upon a rotary bearing by means of a flexible coupling.

Fixed joint for aligning parts

The three-axis system is intended for aligning parts and samples. As only small paths of a few millimetres or degrees are sufficient for such corrective movements, a rotary movement can be generated with a linear stage if it transmits its movement to an otherwise passive rotary stage by means of a solid-state joint. The advantage of such a solid-state joint is that it transfers the precision of the linear stage completely to the rotary stage. If the deflection remains below 5 degrees, the stiffness of this joint also remains sufficient to transmit movements in the nanometer range in the tensile and compressive directions.

Suitable for use in the semiconductor industry

Depending on the resolution of the measuring system installed in the table, repeat accuracies of at least 30 nm can be achieved. Please note that a measuring system with a higher resolution than the standard version specified here must be used for this. The manipulator is of particular interest in automated micro-assembly systems or for experimental set-ups in research. The manipulator is very well suited for aligning wafers in the semiconductor industry. The manipulator is also suitable for use in a vacuum and is available in a corresponding version.