MP220-4 Miniature XY-Phi-Delta Positioning System, Cardan on XY Aperture Stage | Hexapod Alternative | Travel XY 10 mm Rx Ry 4° | High Loads up to 10 kg
Compact Multi Axis Stages

AB_EM TO MP250-4

Cardan on XY Stage with aperture

This XY Phi Delta Aligner combines three vertically operating precision axes connected to a movable load plate. The load plate can be tilted in two axes and the aperture stage for a additional XY motion.

Ideal for optical and active alignment for high loads up to 10 kg

Large aperture for high-resolution scanning applications

Good price-performance ratio and very long lifetime

Options:

Rotation around the main axis with an additional rotary stage
Various, high-resolution measuring systems
Extended travels in XY direction
Version for cleanroom, vacuum and beam
Customized development with 3D design, prototypes, series production

Application fields

Optical & active alignment, high-resolution applications in microscopy, optical inspection systems, 3D imaging, screening, incident light measurement, transmitted light measurement, interferometry, metrology, autofocus systems, biotechnology, semiconductor testing

Specifications

MP220-4		X	Y	Rx	Ry
Travel	[mm]	(20) 10	(20) 10	4	4
Repeatability unidirectional	[µm]	± 0.5	± 0.5	± 0.003	± 0.003
Repeatability bidirectional	[µm]	± 1	± 1	± 0.01	± 0.01
Positioning speed	[mm/s]	2	2	0.1	0.1
Max. speed	[mm/s]	4	4	0.2	0.2
Max. Load	[N]	0	0		100
Length x width x height	[mm]	235 x 220 x 100
Aperture	[mm]	Ø 45
Drive		Lead Screw	Lead Screw	Lead Screw	Lead Screw
Screw type		M5,55625x0,6096
Motor		Stepper Motor	Stepper Motor	Stepper Motor	Stepper Motor
Feedback		Open Loop	Open Loop	Open Loop	Open Loop
Material		Anodized Aluminum
Optional features		Rotary stage, sample holder, calibreless energy supply for unlimited rotation
Variants clean room		up to cleanroom class ISO 4 (higher on request)
Variants beam		UV, DUV (EUV, X-ray, gamma on request)
Variants Magnetism		magnetic (low-magnetic on request)
Variants vacuum		up to 10E-6 mbar (higher on request)
Note		Fixed pivot position 25 mm below stage surface. For fixed inspection point, correct with offset when tilting.