MP210-3 XYZ Positioning System, temperature stable 0 - 40°C | DC Motor, Lead Screw, Linear Scale | Aperture 150 mm / 5" | Travel 25 x 25 x 25 mm
Compact Multi Axis Stages

782327:001.26, 782327:002.26

Compact XYZ stage for samples up to 5"

This XYZ system allows the positioning of a sample holder for highly stable double-sided incident and transmitted light measurements. Loading and focusing is realized by vertical movement with a stroke of 25 mm. The holder is designed for round samples such as optical fibers or smaller wafers and can be adapted to various sizes and processes.

High precision at temperature fluctuations

Ideal for limited installation space and fluctuating temperatures from 0 - 40°C

Travel ranges up to 25 mm in the minimum of space

Absolute position stability, even when the motor is switched off

Consistent measurement results due to high repeatability

Optional:

Adaptation to the process: samplet, holder, feeder, sensor
Configuration for clean room ISO 14644-1 (up to class 1 on request)
Individual design with rack, vibration isolation, enclosure
Individual solution development with 3D design for the positioning task

Individual extensions and customizations

Engineering services include the fitting of the systems to your structure and the desired motion control or the completely

Specifications

782327:001.26, 782327:002.26		X	Y	Z
Standard System		MT63	MT63	MT63
Travel	[mm; deg]	25	25	25
Repeatability unidirectional	[µm; deg]	± 0.8	± 0.8	± 0.8
Repeatability bidirectional	[µm; deg]	± 3.8	± 3.8	± 3.8
Positioning speed	[mm/s; deg/s]	1.8	1.8	1.8
Max. Speed	[mm/s; deg/s]	3.6	3.6	3.6
Max. load	[N]	10	11	11
Motor		DC-Motor	DC-Motor	DC-Motor
Drive		Lead Screw	Lead Screw	Lead Screw
Feedback		Linear Scale	Linear Scale	Linear Scale
Length x width x height	[mm]	206 x 259 x 137 mm