MP200-5 Miniature XYZ Phi Delta Positioning System, 3Z Tripod on a XY Stage, Hexapod Alternative | Travel XYZ 2 x 2 x 2 mm, Ryz 1.5 x 1.5°
Compact Multi Axis Stages

782497:013.26

Ultra high precision 5-axis adjuster

up to 20 N load, 0.007 µm resolution for finest incremental movements

The motorized centering and levelling stage moves its five degrees of freedom extremely consistently. The system can be moved in all three directions. It can also be tilted at two angles in planarity.

ultra high resolution up to 0.007 µmm

maximum positioning accuracy with ± 1.5° in R_x and R_y

load capacity up to 20 N

finest motions up to 0.07 µm due to robust, self-retaining sliding thread drives

highest resistance to interference due to solid bearing joints

absolutely constant repeatability up to ± 0.5 µm using all degrees of freedom

very compact due to the integrated 5-axis control electronics

simple power supply and a standard data interface form the connection to the superordinate system

Wireless Data and Energy Transmission

His overall strength makes the manipulator in combination with a rotary stage. The MP200-5 is the only positioning system of this type that transmits energy and control data wirelessly. Therefore precise operating parameters can be realized without disturbing effects by sliding contacts.

Fields of application

High-precision alignment of objects in manufacturing and metrology equipment, rotational tomography, CT scanning, 3D inspection of components, roundness measuring equipment, semiconductor inspection, optical centering systems, calibration systems or general inspection systems

Specifications

MP200-5 (782497:014.26)		X	Y	Z	Rx	Ry
Standard System		MT63-DC	MT63-DC	MT63-DC	MT63-DC	MT63-DC
Travel	[mm]	4	4	4	3	3
Repeatability unidirectional	[µm]	± 0.5	± 0.5	± 0.5	± 0.00005	± 0.00005
Repeatability bidirectional	[µm]	± 2.5	± 2.5	± 2.5	± 0.00020	± 0.00020
Positioning speed	[mm/s]	1	1	1	0.8	0.8
Max. speed	[mm/s]	1.8	1.8	1.8	1.5	1.5
Max. Load	[N]	20
Length x width x height	[mm]	235 x 200 x 100
Aperture	[mm]	Ø 45
Weight	[kg]	10
Drive		Gleitgewinde, Riemen
Screw type		M5x0,5
Motor		DC-Motor
Feedback		Motor Encoder
Resolution Measuring System		0.1 µm (optional up to 0.001 µm)
Material		Anodized Aluminum
Optional features		Rotary stage, sample holder, calibreless energy supply for unlimited rotation
Variants clean room		up to cleanroom class ISO 4 (higher on request)
Variants beam		UV, DUV (EUV, X-ray, gamma on request)
Variants magnetism		magnetic (low-magnetic on request)
Variants vacuum		up to 10E-6 mbar (higher on request)