Compact Multi Axis Stages

Manipulators and aligners provide maximum precision with multiple degrees of freedom and small strokes in the smallest dimensions.

Combining an aligner with a fast automation system such as a robot can make your unit a thousand times more precise. The robot carries out the rough, large movements while the aligner positions objects with micro-precision. Sharing the task between these two components can raise the throughput and make extreme precision cost-efficient.

MP53-3 Miniature XYZ Positioning System, cartesian | Piezo Motor, Linear Scale | Rep ± 0.2 µm | Travel 10 x 10 x 10 mm
MP53-3 Miniature XYZ Positioning System, cartesian | Piezo Motor, Linear Scale | Rep ± 0.2 µm | Travel 10 x 10 x 10 mm
MP63-3 Miniature XYZ Positioning System, cartesian | DC Motor / Stepper Motor, Lead Screw | Rep ± 0.8 µm | Travel 25 x 25 x 25 mm
MP63-3 Miniature XYZ Positioning System, cartesian | DC Motor / Stepper Motor, Lead Screw | Rep ± 0.8 µm | Travel 25 x 25 x 25 mm
MP95-3 Miniature XYZ Positioning System, cartesian | Ball Screw, DC Motor, Linear Scale | Rep ± 1.5 µm | Travel 40 x 40 x 40 mm
MP95-3 Miniature XYZ Positioning System, cartesian | Ball Screw, DC Motor, Linear Scale | Rep ± 1.5 µm | Travel 40 x 40 x 40 mm
MP130-3 Miniature XYZ Positioning System, cartesian | DC Motor/ Stepper Motor, Ball Screw | Rep ± 2.3 µm | Travel 50 x 50 x 50 mm
MP130-3 Miniature XYZ Positioning System, cartesian | DC Motor/ Stepper Motor, Ball Screw | Rep ± 2.3 µm | Travel 50 x 50 x 50 mm
MP200-3 Miniature Z-Phi Delta Positioning System, Tripod | Stepper Motor, Lead Screw | Travel 2 mm x 1.5° x 1.5°
MP200-3 Miniature Z-Phi Delta Positioning System, Tripod | Stepper Motor, Lead Screw | Travel 2 mm x 1.5° x 1.5°
5DOF Miniature XYZ-Phi-Delta Positioning System, Tripod on XY Aperture Stage | Hexapod Alternative | Travel XY 100 x 100 mm, Z 4 mm, Rx Ry 4°
5DOF Miniature XYZ-Phi-Delta Positioning System, Tripod on XY Aperture Stage | Hexapod Alternative | Travel XY 100 x 100 mm, Z 4 mm, Rx Ry 4°
MP220-4 Miniature XY-Phi-Delta Positioning System, Cardan on XY Aperture Stage | Hexapod Alternative | Travel XY 10 mm Rx Ry 4° | High Loads up to 10 kg
MP220-4 Miniature XY-Phi-Delta Positioning System, Cardan on XY Aperture Stage | Hexapod Alternative | Travel XY 10 mm Rx Ry 4° | High Loads up to 10 kg
MP53-2-1 Miniature XY-Phi Positioning System, cartesian with Rz correction, magnet-free | XY-Rz Piezo Motor, Linear Scale
MP53-2-1 Miniature XY-Phi Positioning System, cartesian with Rz correction, magnet-free | XY-Rz Piezo Motor, Linear Scale
MT130-3-3 Miniature 6-Axis Aligner, cartesian linear motion with eucentric rotary adjustment | Travel XYZ 50 x 50 x 50 mm, Rxyz 4 x 4 x 4°.
MT130-3-3 Miniature 6-Axis Aligner, cartesian linear motion with eucentric rotary adjustment | Travel XYZ 50 x 50 x 50 mm, Rxyz 4 x 4 x 4°.
MP210-3 XYZ Positioning System, temperature stable 0 - 40°C | DC Motor, Lead Screw, Linear Scale | Aperture 150 mm / 5" | Travel 25 x 25 x 25 mm
MP210-3 XYZ Positioning System, temperature stable 0 - 40°C | DC Motor, Lead Screw, Linear Scale | Aperture 150 mm / 5" | Travel 25 x 25 x 25 mm
Z-Phi Rotary Stroke Actuator with integrated controller (clean room ISO 8) | Z Linear Motor, Inductive Sensor | Rz Stepper Motor, Belt | Stroke 14 mm x 360°
Z-Phi Rotary Stroke Actuator with integrated controller (clean room ISO 8) | Z Linear Motor, Inductive Sensor | Rz Stepper Motor, Belt | Stroke 14 mm x 360°
6-axis miniature XYZ-Theta-Phi-Delta positioning system (clean room ISO 5) | Tripod, Rotary Stage, XY- Stage, Hexapod Alternative | Travel XYZ 30 x 30 x 20 mm, RxRy 4°, Rz 360°
6-axis miniature XYZ-Theta-Phi-Delta positioning system (clean room ISO 5) | Tripod, Rotary Stage, XY- Stage, Hexapod Alternative | Travel XYZ 30 x 30 x 20 mm, RxRy 4°, Rz 360°
MP200-5 Miniature XYZ Phi Delta Positioning System, 3Z Tripod on a XY Stage, Hexapod Alternative | Travel XYZ 2 x 2 x 2 mm, Ryz 1.5 x 1.5°
MP200-5 Miniature XYZ Phi Delta Positioning System, 3Z Tripod on a XY Stage, Hexapod Alternative | Travel XYZ 2 x 2 x 2 mm, Ryz 1.5 x 1.5°
MP410-3 High Vacuum Aligner up to 10E-6 mbar | XYRz stepper motor, ball screw | Load 5 kg | Stroke 15 x 15 x 5°
MP410-3 High Vacuum Aligner up to 10E-6 mbar | XYRz stepper motor, ball screw | Load 5 kg | Stroke 15 x 15 x 5°
MP700-3 Flat 3D Aligner | XYRz linear motor, air bearing | Aperture 730 mm | Load 28 kg | Travel 5 x 5 mm x 5°
MP700-3 Flat 3D Aligner | XYRz linear motor, air bearing | Aperture 730 mm | Load 28 kg | Travel 5 x 5 mm x 5°

Angepasstes System für Ihr Gesamtkonzept

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