High precision and modular 3-axis system

The XZ combination consists of the high-precision and durable standard linear axes of the PMT160. This combination is suitable for all applications requiring perfect flatness, smallest tolerances for pitch and yaw, and smooth running behavior. The XZ system is ready to use with controller as well as software and operates with reliable parameters.

 

Flexible, instantly operational and tested

Ideal for setting up and expanding of your application

Highly precise repeatability up to 0.4 µm

Smallest steps and highest reliability at comparatively high positioning speed of 50 mm/s

Perfect flatness of ± 1 for positioning medium loads up to 5 kg

Optional expandable: Different travels per axis from 50 - 300 mm Rotational movements in combination with DT130 or DT200 Various motor variants: DC motor, stepper motor, linear motor and nanomotion Immediate use with pre-configured controller incl. exemplary software Versions for clean room ISO 14644-1

Individual extensions and customizations

Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests

Fields of application

wafer inspection, layer measurement, laboratory test systems, automatic optical inspection (AOI), 3D imaging, microscopy, imaging systems, multi-axis system for laboratory applications, quality assurance, 3-axis sensor measurement, wafer inspection, semiconductor quality insurance