XYZ System for Laboratory and Wafer Inspection | Ball Screw, DC Motor, Cross Roller, Linear Measuring System
Combinations of laboratory axes
782300:113.26
High precision and modular 3-axis system
This XY combination with separate Z-vertical unit consists of the high-precision and durable standard linear axes of the PMT160. This combination is suitable for all applications requiring perfect flatness, smallest tolerances for pitch and yaw, and smooth running behavior. The XYZ system is ready to use with controller as well as software and operates with reliable parameters.
Flexible, instantly operational and tested
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Optional expandable:
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Individual extensions and customizations
Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests
Fields of application
wafer inspection, layer measurement, laboratory test systems, automatic optical inspection (AOI), 3D imaging, microscopy, imaging systems, multi-axis system for laboratory applications, quality assurance, 3-axis sensor measurement
782300:113.26 | X | Y | Z | |
Used standard component | PMT160-DC | PMT160-DC | PMT160-DC | |
[mm; deg] | 300 | 150 | 50 | |
Repeatability unidirectional | [µm; deg] | ± 0.5 | ± 0.5 | ± 0.5 |
Repeatability biidirectional | [µm; deg] | ± 1.5 | ± 1.5 | ± 1.5 |
[mm/s; deg/s] | 25 | 25 | 25 | |
Max. Load | [N] | 45 | 150 | 150 |
Motor |
| DC-Motor | DC-Motor | DC-Motor |
Drive | Ball Screw | Ball Screw | Ball Screw | |
Feedback |
Used Standard Components
PMT160-DC
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