XYZ Microscopy and Inspection Station for high resolution, automated and universal sample inspection
Combinations of laboratory axes

782489:001.26

High-precision inspection system for versatile measuring tasks

This 3-axis positioning system is designed for high-precision metrology applications where the stage moves the object to be measured to the sensor or camera on the Z-axis. The xy stage consists of the reliable KT310 with a DC motor design. Its concept with internal motors, cross roller guides and high-precision ball screws enables excellent precision with optimum use of the installation space.

Highly precise and consistent measurement results

Ideal for sample inspection

High precision repeatability up to 0.3 µm

Reduction of measurement deviations to less than 3 µm

Optionally expandable:

Various travels up to 200 mm
With/without granite base
With/without vibration decoupling
Stepper motor, DC motor and in various measuring system resolutions
Motorized Z-axis e.g. with MT130 or PMT 160
Rotatory movements in combination with DT200
Versions for clean room ISO 14644-1 (up to class 1 on request)
Ready-to-use control with pre-configured controller incl. sample software

Individual extensions and customizations

Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests

Fields of application

Metrology, high-resolution microscopy, biotechnology, medical industry, testing technology, inspection systems

Specifications

782489:001.26		X	Y	Z
Travel	[mm]	200	200	70
Repeatability unidirectional	[µm]	± 0.3	± 0.3
Repeatability bidirectional	[µm]	± 0.7	± 0.7
Positioning speed	[mm/s]	30	30
Max. load Fx	[N]	45	45
Max. load Fy	[N]	45	45
Max. load Fz	[N]	110	110	150
Motor		DC-Motor	DC-Motor
Drive		Ball Screw	Ball Screw	Manuell
Feedback		Linear Scale	Linear Scale