X Phi system for the positioning of optical lenses, cylinders e.g. stylus gauge | X DC motor, ball screw, cross roller, linear measuring system | Phi AC servo, angle measuring system
Combinations of laboratory axes

782300:212.26

 

Excellent stability for enormous resolutions

This X-Phi positioning system consists of high-precision and durable standard axes of the PMT160 linear stage and, for rotation, the DTS130-HM. It is ideal for measuring applications in which the specimen is moved precisely into measuring position and thus no additional feed axis is required.
 

Highly precise and reliable measurement results

  • Ideal for optical measurement of round parts e.g. wafers, optics
  • Saves the additional purchase of a loading axis due to high-precision rotary movements with stroke
  • High repeatability up to 0.0017
  • Moves 1.9 µm precisely with X into the measuring position

Optionally configurable:

  • Travels up to 300 mm
  • Base plate made of granite or aluminum
  • Available with internal scale (270 mm)
  • Can be combined with other rotary stages, e.g. DT200
  • Versions for clean room ISO 14644-1 possible
  • Immediate use with pre-configured controller incl. exemplary software

    Individual extensions and customizations

    Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we like to adapt the systems to the environmental requirements of your application e.g.: dust, radiation, temperature, Precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, test protocol, life tests
     

    Fields application

    Ideal for two-dimensional optical detection of roughness, structure mapping, surface structures, laboratory application, semiconductor inspection, optical inspection systems, quality assurance, motion system stylus gauge

     

    782300:212.26   X Phi (Rz)
    Used standard component   PMT160-DC DTS130-HM
    Travel

    [mm; deg]

    135

    n x 360

    Repeatability unidirectional

    [µm; deg]

    ± 1.9

    ± 0.0017

    Repeatability bidirectional

    [µm; deg]

    ± 2.4

    ± 0.005

    Positioning speed [mm/s, deg/s] 10 50

    Max. load

    [N]

    150

    74

    Motor

     

    DC-Motor

    AC-Servo

    Drive   Ball Screw  
    Feedback

     

    Linear Scale

    Angular Scale

     


    Angepasstes System für Ihr Gesamtkonzept

    Your customized system

    Sie suchen eine technische Lösung für Ihre Anwendung?

    Jetzt den ersten 3D Entwurf in nur wenigen Tagen erhalten:

     

    Katja Weißbach
    Beratung
     

    T +49 (0) 351 88585-64
    E-Mail

     

    Francisco Samuel
    Beratung &
    Projektmanagement

    T +49 (0) 351 88585-85
    E-Mail

     

    Unsere Referenzen