X Phi system for the positioning of optical lenses, cylinders e.g. stylus gauge | X DC motor, ball screw, cross roller, linear measuring system | Phi AC servo, angle measuring system
Combinations of laboratory axes

782300:212.26

Excellent stability for enormous resolutions

This X-Phi positioning system consists of high-precision and durable standard axes of the PMT160 linear stage and, for rotation, the DTS130-HM. It is ideal for measuring applications in which the specimen is moved precisely into measuring position and thus no additional feed axis is required.

Highly precise and reliable measurement results

Ideal for optical measurement of round parts e.g. wafers, optics

Saves the additional purchase of a loading axis due to high-precision rotary movements with stroke

High repeatability up to 0.0017

Moves 1.9 µm precisely with X into the measuring position

Optionally configurable:

Travels up to 300 mm
Base plate made of granite or aluminum
Available with internal scale (270 mm)
Can be combined with other rotary stages, e.g. DT200
Versions for clean room ISO 14644-1 possible
Immediate use with pre-configured controller incl. exemplary software

Individual extensions and customizations

Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we like to adapt the systems to the environmental requirements of your application e.g.: dust, radiation, temperature, Precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, test protocol, life tests

Fields application

Ideal for two-dimensional optical detection of roughness, structure mapping, surface structures, laboratory application, semiconductor inspection, optical inspection systems, quality assurance, motion system stylus gauge

Specifications

782300:212.26		X	Phi (Rz)
Used standard component		PMT160-DC	DTS130-HM
Travel	[mm; deg]	135	n x 360
Repeatability unidirectional	[µm; deg]	± 1.9	± 0.0017
Repeatability bidirectional	[µm; deg]	± 2.4	± 0.005
Positioning speed	[mm/s, deg/s]	10	50
Max. load	[N]	150	74
Motor		DC-Motor	AC-Servo
Drive		Ball Screw
Feedback		Linear Scale	Angular Scale