XY-Z-Phi positioning system with 66 mm aperture (clean room) | XY linear motor, profile rail | Z cross roller, ball screw drive | Phi belt, DC motor | Travel 450 x 350 x 16 mm x 45°
Combinations of industrial axes

782300:145.26

Precise and highly dynamic for samples up to 150 mm / 6"

The system consists of two linear stages PLT320 (X and Y Axes), a lifting stage HT160 (Z Axis) and a rotary stage DT200 (Phi Axis).

Ideal for flexible set-up and expansion of cleanroom systems

High accuracy up to 0.4 µm / 0. 004°

High accelerations and speeds up to 1000 mm/s

Outstanding low heat emission at frequent start and stop phases

Designed for maintenance-free 24/7 operation in clean room environments

Options:

Various, high-resolution measuring systems
Adaptation to the process: travel range, adaptation plate, chuck, base plate, frame, enclosure, safety concept
Individual solution finding with 3D design for the positioning task

Individual extensions and customizations

The engineering services include the adaptation of the systems to your structure and the desired controls or the completely individual solution finding with 3D design for the application-specific positioning task.

In addition, we develop prototypes and are happy to adapt the systems to the environmental requirements of your application, e.g. particle emission, radiation, temperature, precision special parts production, working height, collision protection, safety concept, compensation factor and filter, sensor holder, brake, decoupling, special lubrication, special colors, holder, adapter, special motors with pharmaceutical approval, extensive documentation, test protocol, lifetime tests

Fields of application

Low-particle XYZ-R linear lift rotary positioning, e.g. for cutting systems, inspection systems, semiconductor production, wafer dicing & scribing (silicone, GaAs, InP, silica, glass, etc.), optics, photonics, laser technology

Specifications

782300:145.26		X	Y	Z	Rz
Standard System		PLT320-DLM-L	PLT320-DLM-L	HT160-DC-R	DT200-DC-R/W
Travel	[mm; deg]	450	350	16	45
Repeatability unidirectional	[µm; deg]	± 0.4	± 0.4	± 1.6	± 0.004
Repeatability bidirectional	[µm; deg]	± 0.5	± 0.5	± 2.6	± 0.007
Positioning speed	[mm/s; deg/s]	500	500	8	35
Max. speed	[mm/s; deg/s]	1000	1000	16	70
Max. load	[N]	250	250	45	68
Weight	[kg]	125
Length x width x height	[mm]	960 x 860 x 335
Aperture diameter	[mm]	66
Max. sample diameter		150 mm / 6" (optional larger as special version)
Spindle type				1214.564/1.8.88.124 T5; o. Zapfen
Spindle lead				1
Guide		Profile Rail	Profile Rail	Cross Roller Bearing	Belt
Motor		Iron Core Dynamic Linear Motor	Iron Core Dynamic Linear Motor	DC Motor	DC Motor
Feedback		Linear Scale	Linear Scale	Motor-Encoder	Motor-Encoder
Resolution Measuring system		0.1 µm standard, optionally up to 0.001 µm
Optional features		adaption plate, chuck, base plate (granite / aluminum), frame, housing, safety concept and installation (emergency stop, door switch, safety light curtains, laser scanner, STO, SLS)
Clean room variants		up to clean room class ISO 6 (on request)
Beam variants		UV (DUV, EUV, X-ray, gamma on request)
Variants magnetism		magnetic